Fabrication and characterization of a new MEMS fluxgate sensor with nanocrystalline magnetic core

Lei, Jiang; Lei, Chong; Zhou, Yong

doi:10.1016/j.measurement.2011.10.013

Cited by 12 publications

(4 citation statements)

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“…5, the sensitivity of our sensor increased with increasing excitation current up to 90 mA and then decreased as the excitation current continued to increase beyond this point. This was mainly due to the fact that an excitation current that is too great can increase eddy current loss in the magnetic sensitive element of the sensor, 27 decreasing the output response of the system. In line with this, the following parameter was selected for the detection experiments: an excitation root mean square (RMS) current of 90 mA, which was proven to be an optimal condition for the detection sensitivity of the fabricated sensor.…”

Section: Optimization Of the Test Conditions Of The Uxgate Sensor Symentioning

confidence: 99%

Sensitive detection of cardiac troponin T based on superparamagnetic bead-labels using a flexible micro-fluxgate sensor

et al. 2017

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Section: Optimization Of the Test Conditions Of The Uxgate Sensor Symentioning

confidence: 99%

Sensitive detection of cardiac troponin T based on superparamagnetic bead-labels using a flexible micro-fluxgate sensor

et al. 2017

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“…Due to the 3D solenoid coils, the sensor noise was decreased, and its value was 544 pT/Hz1/2@1 Hz. [ 102 ] It is a single‐core fluxgate sensor design.…”

Section: Advancements In Fluxgate Sensormentioning

confidence: 99%

mentioning

confidence: 99%

Fabrication Advancements in Integrated Fluxgate Sensors: A Mini Review

2022

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Research on magnetic sensors has been carried out in recent years to enhance sensing capability, enabling us to understand the Earth's magnetic field changes [1] with better sensitivities of 10 À10 to 10 À2 T. [2] Magnetic field sensors have been extensively investigated according to their operating principles and actions in various applications. Sensitivity and selectivity are the two essential properties crucial in the evolution of magnetic field sensors to achieve high fidelity outputs. The former is strengthened by increasing the sensor area and improvements to the planar surface with various Nano-materials. In contrast, the latter is improved by using multiple materials and techniques to enhance interfacial interactions.Magnetic sensors detect disturbances and changes in magnetic fields such as force, direction, and flux. It is a transducer that converts a magnetic field into an electrical voltage. There are several types of magnetic field sensors, each with its own sensitivity range. In addition to sensitivity, the temperature range, the physical size of the sensor, and its on-chip manufacturability must all be considered. Magnetic fields of less than 100 pT are extremely weak and far below the earth's magnetic field. Earth magnetic field sensors have a sensitivity range of 10 μT to a few micro-Tesla, while bias magnet field (high field) sensors have a sensitivity of more than 1 mT.Magnetic fields of less than 100 pT are extremely weak and far below the earth's magnetic field. Earth magnetic field sensors have a sensitivity range of 10 μT to a few micro-Tesla, while bias magnet field (high field) sensors have a sensitivity of more than 1 mT. The most sensitive low-field sensor is the superconducting quantum interference device (SQUID). It is based on Brian J. Josephson's research on a point-contact connection for measuring extremely low currents.The SQUID ring, the radio-frequency coil, and the big antenna loop are all superconducting components of the SQUID sensor. All three must be cooled to the point where they become superconducting. The SQUID itself is small, but the requirement for liquid helium cooling makes the entire apparatus big and hefty. Magnetoresistive sensors (MR) have a high sensitivity, are inexpensive to manufacture, and are small in size. However, they have poor noise performance and linearity, as well as a small dynamic range, making them unappealing and unsuitable for many low-noise applications. Furthermore, as the power usage is reduced, their sensitivity degrades.Search-coil or induction sensors are high-sensitivity, lowpower sensors, but their sensitivity decreases as the cross-section area decreases, making miniaturization ineffective. Because search coils can detect an alternating current magnetic field, they cannot detect a static magnetic field like the Earth's magnetic field. Magnetic sensors based on semiconductors, such as Hall-Effect sensors, magnetotransistors, and magnetodiodes, are very small in size. Because of its low manufacturing cost

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“…The most important element of the flux gate is a ferromagnetic core [15][16] made of the nanocrystalline soft magnetic material (FINEMET, type FT-3H) ribbon. This alloy ribbon is highly permeable to the magnetic field and allows reducing the driving current.…”

Section: Fluxgate Configurationmentioning

confidence: 99%