Fabrication and Characterization of a Highly Sensitive and Flexible Tactile Sensor Based on Indium Zinc Oxide (IZO) with Imprecise Data Analysis

Abstract

Tactile sensors are widely used in the electronic industry. In the following research work, we proposed a tactile sensor based on indium zinc oxide (IZO) electrodes and used neutrosophic statistics to analyze the capacitance and resistance of the tactile sensor. The tactile sensor was fabricated by depositing the IZO electrodes on a polycarbonate substrate (a thin layer). The IZO was characterized through X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), and ultraviolet–visible (UV–vis) spectroscopy techniques. The sensor’s electrical properties were characterized using an LCR meter, i.e., capacitance and resistance were measured in intervals with respect to changes in the applied force on the sensor at 1 kHz operational frequency. The sensor expressed high sensitivity with quick response and recovery times. The sensor also expressed long-term stability. For the analysis of capacitance and resistance, two statistical approaches, i.e., classical and neutrosophic approaches, were applied, and the better analysis approach for the sensor was found.

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