1993
DOI: 10.1016/0378-7753(93)80106-y
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Fabrication and characterization of amorphous lithium electrolyte thin films and rechargeable thin-film batteries

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Cited by 550 publications
(435 citation statements)
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“…[ 13 ] A more elaborate description of several lithium ion conductors will be given in section 3.3. Rechargeable all-solid-state lithium-ion batteries were intensively reported in the 1990s, when the group of Bates patented [ 14 ] and published [15][16][17][18][19][20] a planar thin fi lm battery concept based on glassy solid-state electrolytes, for example, lithium phosphate, lithium phosphorus oxynitride and lithium phosphorus silicon oxide. This approach formed the basis for many all-solid-state planar thin-fi lm microbatteries and also frequently served as a source of inspiration for the development of 3D integrated batteries.…”
Section: Historical Context Of Li-ion Solid-state Batteriesmentioning
confidence: 99%
See 1 more Smart Citation
“…[ 13 ] A more elaborate description of several lithium ion conductors will be given in section 3.3. Rechargeable all-solid-state lithium-ion batteries were intensively reported in the 1990s, when the group of Bates patented [ 14 ] and published [15][16][17][18][19][20] a planar thin fi lm battery concept based on glassy solid-state electrolytes, for example, lithium phosphate, lithium phosphorus oxynitride and lithium phosphorus silicon oxide. This approach formed the basis for many all-solid-state planar thin-fi lm microbatteries and also frequently served as a source of inspiration for the development of 3D integrated batteries.…”
Section: Historical Context Of Li-ion Solid-state Batteriesmentioning
confidence: 99%
“…Therefore, only the 4 V region can be applied for practical battery applications, which yields a reversible gravimetric capacity of 148 mAh ⋅ g − 1 . Using a spinel unit cell of Li 8 Mn 16 O 32 with a volume of 550 Å 3 , a theoretical volumetric capacity of 650 mAh ⋅ cm − 3 can be calculated. [ 60 ] …”
Section: Spinel Structuresmentioning
confidence: 99%
“…[3][4][5][6][7][8][9] Contrary to bulk-type lithium batteries, metallic lithium is usually used as the negative electrode in all-solid-state lithium microbatteries, since the solid glassy electrolyte (typically LiPON) is able to prevent the formation of lithium dendrites during the charge. 10 Nevertheless, the deposition of lithium thin films at the industrial scale is actually a real issue. In addition, the presence of metallic lithium in the cells limits their thermal resistance, making them for instance incompatible with the reflow soldering process used to connect the electronic component on the printed circuit board.…”
Section: Introductionmentioning
confidence: 99%
“…These include Li 4 SiO 4 -Li 3 BO 3 , Li 2 O-SiO 2 -2 O 3 , and Li 2 O-SiO 2 -ZrO 2 . Lithium phosphorus oxynitride (LiPON) glasses showed acceptable ionic conductivity (2 × 10 -6 S cm -1 ) when used for thin-film batteries (Bates et al, 1993). The LiPON glasses showed chemical stability against lithium metal because of their structural stability, originating from the introduction of nitrogen ions into the structure.…”
Section: Lithium-ion Conducting Solid Electrolytesmentioning
confidence: 99%