Fabrication and characterization of (Ba, Sr)RuO3 ceramic targets and thin films for ferroelectric BaTiO3 thin-film capacitors

Abstract

We report the preparation of (Ba, Sr)RuO3 ceramic targets in a conventional process in air at ambient pressure and their epitaxial thin-film growth on Ba0.7Sr0.3TiO3 buffered SrTiO3 substrates. We found that a simultaneous addition of CuO and SiO2 is effective in obtaining the relatively dense ceramics. The microstructural and chemical investigations show that the synergetic effect of a liquid-phase (Ba-Sr-O) assisted grain growth accelerated by Cu-derived Ru charge inhomogeneity along with a rearrangement of grains promoted by a liquid-phase silicate is the mechanism of the (Ba, Sr)RuO3 densification. We demonstrate that all epitaxial BaTiO3 thin-film capacitors with (Ba1−xSrx)RuO3 electrodes can be obtained up to x of 0.6.

Polarization and Dielectric Properties of BiFeO3-BaTiO3 Superlattice-Structured Ferroelectric Films

“…Thin films of BaTiO 3 [ 29 ] and Mn(5%)-doped BiFeO 3 [ 28 , 30 ], a (Ba 0.7 Sr 0.3 )TiO 3 buffer layer [ 29 ], and (Ba 0.1 Sr 0.9 )RuO 3 electrodes [ 31 ] were fabricated on (100) SrTiO 3 single-crystal substrates (5 × 5 × 1 mm 3 ) by PLD (KrF excimer laser, λ = 248 nm) using ceramic targets. The details of the deposition conditions are summarized in Supplementary Tables S1 and S2 .…”