Fabrication and characterization of bilayer metal wire-grid polarizer using nanoimprint lithography on flexible plastic substrate

Meng, Fantao; Luo, Gang; Maximov, Ivan; Montelius, Lars; Chu, Jinkui; Xu, Hongqi

doi:10.1016/j.mee.2011.06.008

Cited by 40 publications

(23 citation statements)

References 18 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Large discrepancies in the extinction ratio between the experiment and simulation mainly arise from structural imperfections of the Al nanogratings and clear defects that leak light regardless of its polarization (Figure S4, Supporting Information) . In addition to the surface roughness of the Al nanogratings, pores formed inside the Al during the electroless plating are also structural imperfections.…”

Section: Resultsmentioning

confidence: 98%

Solution‐Processed Aluminum Nanogratings for Wire Grid Polarizers

Kang

Yun

Jang

et al. 2018

Advanced Optical Materials

View full text Add to dashboard Cite

polarized light, the WGP behaves like a metallic mirror, which reflects the incident light because of its high effective extinction coefficient; for transverse magnetic (TM)-mode polarized light, the WGP acts as a dielectric layer, effectively transmitting the incident light. [4] Al is the most commonly used material for WGPs because its refractive indices having low real and high imaginary parts are adequate in providing high TM transmission and TE reflection ( Figure S1, Supporting Information). [4][5][6] Accordingly, the highest performance for both the TM transmittance and extinction ratio (ratio of TM-to TE-mode transmittances) is expected when using Al compared with other metals ( Figure S1g, Supporting Information). Moreover, Al is one of the most abundant metals on earth, low-cost, light-weight, and environmentally stable. Theoretically, an extinction ratio and TM transmittance exceeding 10 000 and 85%, respectively, are expected from sub-100 nm pitch Al WGP. [5,7] To fabricate high-aspect-ratio Al nanostructures, various fabrication processes have been proposed. Especially, nanoimprint lithography, which can produce polymer nanopatterns almost infinitely through repetitive replication from a single master mold, has been widely used. High-aspect-ratio Al nanostructure was formed on the sidewall of a nanoimprinted polymer template by angled metal evaporation and reactive ion etching (RIE). [8][9][10][11] Nanoimprinted polymer resist was also used as an etch mask to create Al nanostructures using RIE. [7,12] However, processes requiring vacuum evaporation and RIE may be insufficiently cost-effective and highthroughput to manufacture Al WGPs. Bottom-up approaches to fabricate WGPs have been attempted, such as colloidal assembly, [13,14] metal-containing block copolymers, [15] and nanowire alignment. [16][17][18] However, the limitations of the material selection and structural versatility caused unsatisfactory WGP performance. Although the formation of metal structures through both electro-and electroless plating has been proposed, a specifically modified template is required for the site-selective growth of metals. [19][20][21][22] For example, hydrophobic or insulating nanostructure was prepared while exposing the hydrophilic or conducting substrate on the bottom portions of the structures, which requires dry etching or photolithography. [19][20][21][22] Moreover, unlike noble metals, the formation of Al nanostructures using solution processes is rare because of the high reactivity of Al with both oxygen and water. Previous studies The wire grid polarizer (WGP) consisting of parallel metal nanogratings is an attractive alternative to conventional polarizers because it offers thin layer thickness, easy integration capability, and outstanding chemical and thermal stability. In this report, a facile solution process is proposed for fabricating Al WGPs. High-aspect-ratio Al nanostructures are formed in a 1D nanoimprinted template by electroless plating. Because of the geometrically irreversible deposition and ...

show abstract

Section: Resultsmentioning

confidence: 98%

Solution‐Processed Aluminum Nanogratings for Wire Grid Polarizers

Kang

Yun

Jang

et al. 2018

Advanced Optical Materials

View full text Add to dashboard Cite

show abstract

“…Although the bilayer nanowire polarizer can get very high extinction ratio when the two metal layers become very close to each other, the transmission efficiency would drop seriously due to the self-shadowing effect [21]. The single layer structure can maintain rectangular cross-section by using proper dry etching processes, and good polarization performance can be obtained.…”

Section: Description Of the Integrated Devicementioning

confidence: 99%

Single-Layer Nanowire Polarizer Integrated With Photodetector and Its Application for Polarization Navigation

et al. 2016

Self Cite

View full text Add to dashboard Cite

We report a method of integrating the single layer nanowire polarizers with photodetectors, and the fabricated device is used as the polarization navigation sensor. The fabrication processes mainly base on nanoimprint lithography and dry etching. The fabrication method can fabricate nanogratings with multi-orientation simultaneously, so angular alignment error is eliminated. The external quantum efficiency of the integrated device is tested, and peak external quantum efficiency of 23% at around 440nm is achieved. The indoor angle output experiment of navigation sensor is investigated, and the angle output error is tested to be within ±0.1°. The outdoor angle output experiment has also been tested, and the errors are less than ±1.5°. The measurement results show the fabricated device is suitable for polarization navigation.

show abstract

“…Lee (2010) fabricated the silver (Ag) gate electrode of organic thin film transistors (OTFTs) on polycarbonate plastic substrate by wet-etching; and Meng et al (2011) fabricated aluminium polarisers on flexible plastic substrates by etching. Lee (2010) fabricated the silver (Ag) gate electrode of organic thin film transistors (OTFTs) on polycarbonate plastic substrate by wet-etching; and Meng et al (2011) fabricated aluminium polarisers on flexible plastic substrates by etching.…”

Section: Introductionmentioning

confidence: 99%

The control system for precise five-axis laser/micro-milling machine tool

Zhang

Chen

Liu

et al. 2016

IJISE

View full text Add to dashboard Cite

Due to the limitation that etching technique is difficult to machine the copper layer of copper-clad polyimide (CCPI) with three-dimensional structure precisely and integrally, an effective way combining laser and micro-milling is proposed to solve this problem. By detecting the control of these two processing methods, a precise five-axis laser/micro-milling machine tool has been developed. The machine tool is based on SIEMENS 840D sl CNC system. The high-speed precise manual/automatic laser control via the NCU rapid digital output is studied. The method using analogue drive module to control laser power and micro-milling spindle is presented. By combining laser and micro-milling together, the precise machining of copper-clad polyimide with high efficiency and low cost is implemented. Experimental results indicate that this machine tool is suitable for manufacturing copper layer with a minimum width of metal removal of 50 μm and has stable performance and high reliability. She received her Bachelor degree of Vehicle Engineering from DaLian JiaoTong University in 2011. Her current research focus is about precision measurement based on micro binocular stereovision in the field of machine vision.

show abstract

Fabrication and characterization of bilayer metal wire-grid polarizer using nanoimprint lithography on flexible plastic substrate

Cited by 40 publications

References 18 publications

Solution‐Processed Aluminum Nanogratings for Wire Grid Polarizers

Solution‐Processed Aluminum Nanogratings for Wire Grid Polarizers

Single-Layer Nanowire Polarizer Integrated With Photodetector and Its Application for Polarization Navigation

The control system for precise five-axis laser/micro-milling machine tool

Contact Info

Product

Resources

About