Fabrication and characterization of epitaxial Ba_07Sr_03TiO_3 thin films for optical waveguide applications

Wang, Dan-Yang; Chan, Helen Lai Wa; Choy, C. L.

doi:10.1364/ao.45.001972

Cited by 16 publications

(12 citation statements)

References 22 publications

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“…[2][3][4][5] Ba 1−x Sr x TiO 3 ͑BST͒, traditionally considered as a superior microwave dielectric material for application in wireless communication, has recently attracted much attention in the optoelectronic community because of its combination of high E-O coefficients, 6,7 high optical clarity, and low optical loss. 8,9 Furthermore, BST thin films have potential to overcome the major drawbacks of currently used E-O ferroelectric materials, such as the high cost and long optical path length of LiNbO 3 and LiTaO 3 single crystals and the environmental burden of lead content in ͑Pb, La͒͑Zr, Ti͒O 3 transparent ceramics and thin films.…”

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confidence: 99%

Optical and electro-optic anisotropy of epitaxial Ba0.7Sr0.3TiO3 thin films

Wang

Chan

et al. 2010

Applied Physics Letters

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The anisotropic optical and electro-optic properties of ferroelectric Ba 0.7 Sr 0.3 TiO 3 thin films, deposited on highly transparent single-crystal MgO ͑001͒, ͑011͒, and ͑111͒ substrates using pulsed laser deposition, were investigated. The experimental results show a strong correlation between optical, electro-optic properties, and the orientation of Ba 0.7 Sr 0.3 TiO 3 thin films. The linear electro-optic coefficient r c of the ͑001͒, ͑011͒, and ͑111͒-oriented Ba 0.7 Sr 0.3 TiO 3 thin films are 99.1, 15.7, and 87.8 pm/V, respectively. Such a correlation may be attributed to the orientation dependent distribution and magnitude of spontaneous polarization.

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confidence: 99%

Optical and electro-optic anisotropy of epitaxial Ba0.7Sr0.3TiO3 thin films

Wang

Chan

et al. 2010

Applied Physics Letters

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“…Root-mean-squared surface roughness of the thin films was between 2 to 3 nm as determined by AFM. The refractive indices at different temperatures were measured by the prism-coupling technique performed at 633 nm [11]. The sample temperature was adjusted by a Peltier heater attached to the back of the sample, with …”

Section: Measurement Of Bst Thin Film Propertiesmentioning

confidence: 99%

“…(Ba,Sr)TiO 3 (BST) is suggested to have potential for active optical device applications, because epitaxial BST thin films on single crystal substrate show low optical losses and good tunability by electric field or temperature [11][12][13]. In this work, (Ba 0.7 Sr 0.3 )TiO 3 was selected as the dielectric material, which has a relatively low Currie temperature for thermal tuning and has well-established receipts for preparing nanostructures out of it [14].…”

Section: Introductionmentioning

confidence: 99%

Thermal tuning of surface plasmon resonance: Ag gratings on barium strontium titanate thin films

et al. 2011

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Surface plasmon tuning via thermally induced refractive index changes in ferroelectrics is investigated. Epitaxial (Ba 0.7 Sr 0.3 )TiO 3 (BST) thin films were deposited on MgO (001) substrates by pulsed laser deposition. The refractive index of BST thin films measured by the prism-coupling technique was found to increase from 2.3932 (TE)/1.9945 (TM) at room temperature to 2.3949 (TE)/1.9965 (TM) at 66°C. Then 30-nm-Ag gratings with periodicity 750 nm and width 300 nm were fabricated on BST by soft ultraviolet nanoimprint lithography and subsequent lift-off process. The reflection spectra from 500 to 1000 nm with incident angle from 5°to 60°were measured at room temperature and 66°C, with a collimated and p-polarized light incident perpendicularly to the grating direction. Several modes were observed from the spectra. At 66°C, a red shift of a dip at about 850 nm by 2 nm was obtained at an incident angle of 15°. Calculations confirmed that the observed modes belong to the (−1), (2), (−2) and (3) surface plasmon modes from the Ag and BST interfaces and localized mode; the red shift by thermal tuning is also confirmed. The results indicate the feasibility of active modulation in surface plasmon resonance in solid-state structures.

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“…The thickness of the grown films reaches a few hundreds of nanometers, and their crystalline quality is varied from high-quality epitaxial films to almost amorphous or nanocrystalline microstructures. [8][9][10][11][12][13] Among the various deposition techniques, liquid delivery MOCVD was successfully applied for growing high-quality BTO films on MgO substrates. [14][15][16] There are numerous literature sources in which the MOCVD growth of BST films is documented, [17][18][19][20][21][22] however to the best of our knowledge there are no reports of epitaxial growth of sub-micrometer thick BST thin films produced by MOCVD.…”

Section: Introductionmentioning

confidence: 99%

Novel Low Melting Point Barium and Strontium Precursors for the MOCVD Growth of Barium‐Strontium‐Titanate Films

Kuzmina¹,

Малкерова²,

Alikhanyan³

et al. 2009

Chemical Vapor Deposition

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Novel barium and strontium precursors, belonging to the family of volatile complexes of the alkaline earth element (AEE) fluorinated b-diketonates with polyglymes, [M(dfhd) 2 (tetraglyme)] [Hdfnd ¼ 1,1,1,2,2,6,6,7,7,7-dekafluoro-heptane-3,5-dione, M ¼ Ba (I), Sr (II)], are synthesized and tested with an aim to use them for metal-organic (MO)CVD of Ba x Sr 1-x TiO 3 (BST) thin films. The thermal behavior and composition of vapor phases for compounds I and II are studied by thermal analysis and mass spectrometry (MS). Considerable reduction of the melting point (down to 80-90 8C) for both compounds I and II, as compared to known volatile complexes, is achieved. By means of the developed precursors, epitaxial BST films (x ¼ 0.5) are grown on SrTiO 3 substrates by using the modified MOCVD facility. The quality of the grown films is examined by high-resolution (HR) X-ray diffraction (XRD) and high-resolution (HR) scanning electron microscopy (SEM).

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Fabrication and characterization of epitaxial Ba_07Sr_03TiO_3 thin films for optical waveguide applications

Cited by 16 publications

References 22 publications

Optical and electro-optic anisotropy of epitaxial Ba0.7Sr0.3TiO3 thin films

Optical and electro-optic anisotropy of epitaxial Ba0.7Sr0.3TiO3 thin films

Thermal tuning of surface plasmon resonance: Ag gratings on barium strontium titanate thin films

Novel Low Melting Point Barium and Strontium Precursors for the MOCVD Growth of Barium‐Strontium‐Titanate Films

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