“…As a promising alternative to Si-based technology, detectors fabricated from III-nitride materials, in particular AlGaN, have been investigated and exhibit excellent potential [1][2][3][4][5]. AlGaN has a wide, direct band gap ranging from 364 to 200 nm, which covers much of the UV spectrum [6]. However, there are some major problems with epitaxial AlGaN, such as slow growth rates, gas-phase parasitic reactions and the presence of defects in large quantities, which are generated during heteroepitaxy and post-epitaxial treatment.…”