Fabrication and characterization of high-temperature AlN thick-film piezoelectric accelerometer

Lv, Ting; Pelenovich, Vasiliy O.; Xu, Chang; Zeng, Xiaomei; Hou, Dongyang; Xiong, Zechang; Yang, Bing; Dong, Fang; Liu, Sheng

doi:10.1016/j.ceramint.2024.09.051

Ceramics International

2024

DOI: 10.1016/j.ceramint.2024.09.051

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Fabrication and characterization of high-temperature AlN thick-film piezoelectric accelerometer

Ting Lv,

Vasiliy O. Pelenovich,

Chang Xu

et al.

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Fabrication and characterization of high-temperature AlN thick-film piezoelectric accelerometer

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References 32 publications

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