“…Recent work on free-standing metallic thin films is more applicable to bimaterial microcantilevers since the films have been studied in the asdeposited state at lower temperatures and stresses [ 16, 25, 261. Previous studies have examined the nonlinear thermo-elastic behavior [44], thermomechanical cyclic response [27, 451, and creep behavior [18, 191 of AdSi microcantilevers and microplates. Prior creep and stress relaxation studies on AdSi microstructures have examined creep in plates and beams after an annealing temperature of 190 "C and a hold temperature of 120 "C [18,191. The effect of different annealing temperatures or hold temperatures was not considered.…”