Fabrication and characterization of IC-processed brightness enhancement films

Lin, Liwei; Skia, T.K.; Chiu, Chun-Jung

doi:10.1109/sensor.1997.635732

Cited by 2 publications

(1 citation statement)

References 1 publication

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In this paper, both laboratory and commercial processes have used the same patterns of micro pyramids with base width of 30 m. These micro pyramid structures have been successfully used as the brightness enhancement films for LCD applications [Lin et al (1997)]. For this kind of optical applications, it is important to examine the surface quality of these hot embossed microstructures.…”

Section: Introductionmentioning

confidence: 99%

Comparative study of hot embossed micro structures fabricated by laboratory and commercial environments

Lin

Cheng

Chiu

1998

Microsystem Technologies

View full text Add to dashboard Cite

Hot embossed microstructures fabricated by laboratory and commercial environments have been studied. The laboratory process uses silicon with micropyramid patterns as the mold insert. Fine replication by using Polymethyl Methacrylate (PMMA) has been achieved. The commercial process uses electroplated nickel as the mold insert. Polyvinyl Chloride (PVC), which has a lower glass transition point than PMMA, has been used as the raw material. Fabrication results show that the laboratory process, although taking about 2 hours long per run, can successfully replicate microstructures. The commercial process which takes only 1 minute per run may be fine tuned for good replication. Atomic Force Microscope (AFM) has been used to analyze the fabricated microstructures. It is found that the root mean square (r.m.s.) roughness of PMMA is about 4 nm and that of PVC is about 10-15 nm. Defects including voids and bumps on both PMMA and PVC films have been found.

show abstract

Section: Introductionmentioning

confidence: 99%