2013
DOI: 10.1016/j.mee.2013.01.060
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Fabrication and characterization of injection molded multi level nano and microfluidic systems

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Cited by 30 publications
(36 citation statements)
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“…In order to balance between the requirements of hydrodynamic resistance and of delivery of the optical power, overlap of deep channels and removal of solid wall separation are required. This marks a difference with previous work [22,23]: in order to precisely overlap deep channels with slight difference in depth, a modified multilayer process is required. The reason is that once a deep channel is dry etched into silicon, the spin coating of a uniform layer of resist for an aligned UV exposure is not possible due to the resist entering the deep channel.…”
Section: Discussionmentioning
confidence: 84%
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“…In order to balance between the requirements of hydrodynamic resistance and of delivery of the optical power, overlap of deep channels and removal of solid wall separation are required. This marks a difference with previous work [22,23]: in order to precisely overlap deep channels with slight difference in depth, a modified multilayer process is required. The reason is that once a deep channel is dry etched into silicon, the spin coating of a uniform layer of resist for an aligned UV exposure is not possible due to the resist entering the deep channel.…”
Section: Discussionmentioning
confidence: 84%
“…Bonding was performed with lids ranging in thicknesses from 100 µm to 2 mm before the insertion and gluing of the fibers. Not only did the placement of the fibers after chip sealing provide a simplified alternative assembly but the bonding of thicker lids makes it possible to have systems with resistance to higher pressures (up to 9 bar with a 100 µm lid) [23]. Thanks to this feature, the filling time of the HC fiber can be reduced down to few minutes, which will be important for the feasibility of a sensor development.…”
Section: Discussionmentioning
confidence: 99%
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