Fabrication and characterization of integrated uncooled infrared sensor arrays using a-Si thin-film transistors as active elements

Yue, Ruifeng; Liu, Litian

doi:10.1109/jmems.2005.851807

Cited by 36 publications

(8 citation statements)

References 35 publications

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“…A-Si thin films have also been used in microbolometer technology for infrared imaging [11,12], owing to their high temperature coefficient of resistance (e.g., up to 3% K −1 [13]) and low thermal conductivity. Understanding the thermal transport characteristics of amorphous thin films is important for the thermal design and management of these novel electronic devices.…”

Section: Introduction: Relevance Of Thermal Transport In Amorphous Ma...mentioning

confidence: 99%

Thermal transport in amorphous materials: a review

Wingert

Zheng

Kwon

et al. 2016

Semicond. Sci. Technol.

127

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Thermal transport plays a crucial role in performance and reliability of semiconductor electronic devices, where heat is mainly carried by phonons. Phonon transport in crystalline semiconductor materials, such as Si, Ge, GaAs, GaN, etc, has been extensively studied over the past two decades. In fact, study of phonon physics in crystalline semiconductor materials in both bulk and nanostructure forms has been the cornerstone of the emerging field of 'nanoscale heat transfer'. On the contrary, thermal properties of amorphous materials have been relatively less explored. Recently, however, a growing number of studies have re-examined the thermal properties of amorphous semiconductors, such as amorphous Si. These studies, which included both computational and experimental work, have revealed that phonon transport in amorphous materials is perhaps more complicated than previously thought. For instance, depending on the type of amorphous materials, thermal transport occurs via three types of vibrations: propagons, diffusons, and locons, corresponding to the propagating, diffusion, and localized modes, respectively. The relative contribution of each of these modes dictates the thermal conductivity of the material, including its magnitude and its dependence on sample size and temperature. In this article, we will review the fundamental principles and recent development regarding thermal transport in amorphous semiconductors.

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Section: Introduction: Relevance Of Thermal Transport In Amorphous Ma...mentioning

confidence: 99%

Thermal transport in amorphous materials: a review

Wingert

Zheng

Kwon

et al. 2016

Semicond. Sci. Technol.

127

View full text Add to dashboard Cite

show abstract

“…The optical stability of CNT films enables ultrabroadband THz detection, ranging from MMW to IR and NIR, with a sensitivity comparable to that of existing solid-state sensors. [25,38,39,[111][112][113][114] In addition, the inherent THz detection capability of the devices can remain unaffected regardless of the operating temperatures and mechanical deformations, owing to the robust physical durability of CNT films. In the next section, we explain the techniques used to improve the performance of the PTE sensors with the CNT film after fundamental descriptions of the figures of merit: the PTE and noise equivalent power.…”

Section: Sensor Typementioning

confidence: 99%

Broadband Photodetectors and Imagers in Stretchable Electronics Packaging

Araki

Suzuki

et al. 2023

Advanced Materials

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The integration of flexible electronics with optics can help realize a powerful tool that facilitates the creation of a smart society wherein internal evaluations can be easily performed nondestructively from the surface of various objects that is used or encountered in daily lives. Here, organic‐material‐based stretchable optical sensors and imagers that possess both bending capability and rubber‐like elasticity are reviewed. The latest trends in nondestructive evaluation equipment that enable simple on‐site evaluations of health conditions and abnormalities are discussed without subjecting the targeted living bodies and various objects to mechanical stress. Real‐time performance under real‐life conditions is becoming increasingly important for creating smart societies interwoven with optical technologies. In particular, the terahertz (THz)‐wave region offers a substance‐ and state‐specific fingerprint spectrum that enables instantaneous analyses. However, to make THz sensors accessible, the following issues must be addressed: broadband and high‐sensitivity at room temperature, stretchability to follow the surface movements of targets, and digital transformation compatibility. The materials, electronics packaging, and remote imaging systems used to overcome these issues are discussed in detail. Ultimately, stretchable optical sensors and imagers with highly sensitive and broadband THz sensors can facilitate the multifaceted on‐site evaluation of solids, liquids, and gases.

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“…19) Finally, uncooled infrared sensors arrays for thermal imaging are other types of physical sensors for applications like IR spectroscopy, pollution control or monitoring of semiconductors wafers during processing. 20,21) In parallel to physical sensors, many studies have been performed in the field of chemical and biochemical sensing.…”

Section: State-of-the-art Applications Using Tft Technologymentioning

confidence: 99%

Review on thin-film transistor technology, its applications, and possible new applications to biological cells

Tixier‐Mita

Ihida

Ségard

et al. 2016

Jpn. J. Appl. Phys.

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This paper presents a review on state-of-the-art of thin-film transistor (TFT) technology and its wide range of applications, not only in liquid crystal displays (TFT-LCDs), but also in sensing devices. The history of the evolution of the technology is first given. Then the standard applications of TFT-LCDs, and X-ray detectors, followed by state-of-the-art applications in the field of chemical and biochemical sensing are presented. TFT technology allows the fabrication of dense arrays of independent and transparent microelectrodes on large glass substrates. The potential of these devices as electrical substrates for biological cell applications is then described. The possibility of using TFT array substrates as new tools for electrical experiments on biological cells has been investigated for the first time by our group. Dielectrophoresis experiments and impedance measurements on yeast cells are presented here. Their promising results open the door towards new applications of TFT technology.

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Fabrication and characterization of integrated uncooled infrared sensor arrays using a-Si thin-film transistors as active elements

Cited by 36 publications

References 35 publications

Thermal transport in amorphous materials: a review

Thermal transport in amorphous materials: a review

Broadband Photodetectors and Imagers in Stretchable Electronics Packaging

Review on thin-film transistor technology, its applications, and possible new applications to biological cells

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