Fabrication and characterization of MEMS cantilever array for switching applications

Khushalani, Deepak; Pande, Rajesh S.; Patrikar, Rajendra M.

doi:10.1016/j.mee.2016.02.022

Cited by 5 publications

(4 citation statements)

References 11 publications

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“…8(a) and (b). The lifespan of MG ribbon that exceeds 7000 cycles used as an electromechanical switch is better than the lifespan of a conventional steel material using elastic deformation [17].…”

Section: Lifespan Of the Mg Ribbon Subjected To Cyclic Loadingmentioning

confidence: 98%

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On a new electromechanical switch using the reversible wavy elastic response of metallic glass ribbons

Yousfi

Ammari

Hajlaoui

et al. 2017

Comptes Rendus. Mécanique

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Section: Lifespan Of the Mg Ribbon Subjected To Cyclic Loadingmentioning

confidence: 98%

“…Electromechanical switches are widely used in electrical and mechanical systems such as motors, buildings, medicine, aviation, sports, automotive fields [16,17]. They are found in several types: electrical switches, safety switches, position switches, pressure or force sensors... etc.…”

Section: Novel Electromechanical Switch From Metallic Glass Ribbonmentioning

confidence: 99%

On a new electromechanical switch using the reversible wavy elastic response of metallic glass ribbons

Yousfi

Ammari

Hajlaoui

et al. 2017

Comptes Rendus. Mécanique

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“…Microelectromechanical system cantilever beam switches are playing a very significant role in developing the word of miniaturization while maintaining the required qualities of switches. 1 The common driving methods are electrostatic drive, thermal drive, electromagnetic drive, and piezoelectric drive. Because of its simplicity and low power consumption, electrostatic drive is most widely used in micro-mechanical system.…”

Section: Introductionmentioning

confidence: 99%

Theoretical and experimental analysis on deflection control of photovoltaic-electrostatic cantilever beam

Tang

Chen

Wang

et al. 2019

Advances in Mechanical Engineering

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A model of photovoltaic-electrostatic cantilever beam based on lanthanum-modified lead zirconate titanate ceramic is proposed in this article. New equivalent electrical model of lanthanum-modified lead zirconate titanate ceramic connected to a parallel plate composed of two copper foils is obtained by modifying the original lanthanum-modified lead zirconate titanate equivalent electrical model. After that, the mathematical model of photovoltaic-electrostatic cantilever beam is established. Furthermore, the influences of ultraviolet light intensity and copper foil length on the deflection of the photovoltaic-electrostatic cantilever beam are analyzed via the theoretical and experimental methods. The analysis results indicate that the deflection at the free end of cantilever beam increases with the increase in light intensity and length of the copper foil. The photovoltaic-electrostatic flexible cantilever beam can be taken as a micro-actuator with the advantages of remote control and clean drive.

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“…These materials (PZT, ZnO, AlN, etc.) offer a number of unique benefits compared to other materials/ceramics and are widely used in the development of microelectromechanical systems (MEMS) as filters [ 13 , 14 ], switches [ 15 ], generators [ 16 ], micro-pumps [ 17 ], etc. They cover many different approaches as microarrays, DNA sequencing, sample preparation and analysis, cell separation and detection, or environmental monitoring.…”

Section: Introductionmentioning

confidence: 99%

Design of Controllable Novel Piezoelectric Components for Microfluidic Applications

Čekas

Janušas

Guobienė

et al. 2018

Sensors

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This paper reviews recent investigations and achievements in the design of controllable functional components for improving microfluidic systems, its effectiveness, and functionality. The main purpose was to design novel microstructures with piezoelectric properties (microresonators), which enable one to control the effectiveness of fluid flow in micro-hydro-mechanical devices for biomedical/biochemical purposes. Controllable properties were obtained by incorporating different types of binders in a piezoelectric ceramic matrix (lead zirconate titanate): polyvinyl butyral (PVB), poly methyl methacrylate (PMMA), and polystyrene (PS). The change in chemical composition of PZT helps to manipulate the piezoelectric characteristics, surface morphology, mechanical properties, etc., of the designed microfluidic element with the microstructure in it.

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Fabrication and characterization of MEMS cantilever array for switching applications

Cited by 5 publications

References 11 publications

On a new electromechanical switch using the reversible wavy elastic response of metallic glass ribbons

On a new electromechanical switch using the reversible wavy elastic response of metallic glass ribbons

Theoretical and experimental analysis on deflection control of photovoltaic-electrostatic cantilever beam

Design of Controllable Novel Piezoelectric Components for Microfluidic Applications

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