“…To achieve this, it is necessary to produce a template with a high aspect ratio by microfabricating the underlying thin film using reactive ion etching (RIE). [17][18][19][20][21] Based on the results of our previous studies, 1,2,22) we processed ferroelectric BNEuT thin films into microplates (MPs) and microrods (MRs), since ferroelectric materials containing dielectric metal elements (Bi, Nd, Eu, and Ti) exhibit high reactivity with chlorine compared with ferromagnetic materials containing transition metal elements (Co and Fe) in the RIE process. Using these underlying layers (ferroelectric pillars), we fabricated several MF composite films and examined their structural, magnetic, and electrical properties.…”