Fabrication and characterization of narrow-band Bragg-reflection filters in silicon-on-insulator ridge waveguides

Murphy, Thomas E.; Hastings, J. T.; Smith, Henry I.

doi:10.1109/50.971688

Cited by 143 publications

(65 citation statements)

References 20 publications

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“…The analyzed devices produced an average measured coupling constant of 62 ± 10cm 1 , demonstrating a grating efficiency comparable to that of etched gratings in silicon on insulator previously reported [2].…”

Section: Device Characterizationmentioning

confidence: 59%

“…The majority of the SOI gratings in the literature rely on reactive ion etching to achieve a periodic refractive index modulation on the waveguide surface. Different configurations of SOI Integrated Bragg gratings have appeared in the literature in the last 10 years, such as those presented by Murphy et al [2], amorphous silicon gratings [3], SiON hybrid grating devices [4], and more recently, silicon self implanted Bragg gratings [5]- [6]. In this work we demonstrate the concept of erasable ion implanted Bragg gratings, which could be used in the development of an optical wafer scale testing technique.…”

Section: Introductionmentioning

confidence: 95%

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Laser erasable implanted gratings for integrated silicon photonics

et al. 2011

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Abstract:In this work we experimentally demonstrate laser erasable germanium implanted Bragg gratings in SOI. Bragg gratings are formed in a silicon waveguide by ion implantation induced amorphization, and are subsequently erased by a contained laser thermal treatment process. An extinction ratio up to 24dB has been demonstrated in transmission for the fabricated implanted Bragg gratings with lengths up to 1000µm. Results are also presented, demonstrating that the gratings can be selectively removed by UV pulsed laser annealing, enabling a new concept of laser erasable devices for integrated photonics.

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Section: Device Characterizationmentioning

confidence: 59%

Section: Introductionmentioning

confidence: 95%

Laser erasable implanted gratings for integrated silicon photonics

et al. 2011

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“…The Bragg grating itself is typically formed through a lithographic patterning technique and an etching sequence, although, relatively recently, focused ion beam milling has been used to realize higher-order mode conversion and filtering in SOI [10]. Perhaps the benchmark for performance of gratings in SOI waveguides remains the work of Murphy et al [11]. There, surface relief gratings with a period of 223 nm were formed in 3 μm high SOI rib waveguides via interference photolithography and plasma etching to a depth of 150 nm.…”

Section: Introductionmentioning

confidence: 99%

Optical Filters Utilizing Ion Implanted Bragg Gratings in SOI Waveguides

Bulk

Knights

Jessop

et al. 2008

Advances in Optical Technologies

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The refractive index modulation associated with the implantation of oxygen or silicon into waveguides formed in silicon-oninsulator (SOI) has been investigated to determine the feasibility of producing planar, implantation induced Bragg grating optical filters. A two-dimensional coupled mode theory-based simulation suggests that relatively short grating lengths, on the order of a thousand microns, can exhibit sufficient wavelength suppression, of > 10 dB, using the implantation technique. Fabricated planar implanted slab-guided SOI waveguides demonstrated an extinction of −10 dB for TE modes and −6 dB for TM modes for the case of oxygen implantation. Extinctions of −5 dB and −2 dB have been demonstrated with silicon implantation.

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“…Therefore, in the past decades, SOI waveguides have been attractive choices for integration with Bragg grating structures [8,10,11]. A main group of SOI structures are strip waveguides which are used in many applications, including WDM add/drop filters and grating couplers [4,12,13].…”

Section: Introductionmentioning

confidence: 99%

“…Examples of prevalent grating-based components are add/drop filters for wavelength-division-multiplexing (WDM) communication systems, grating-assisted couplers, dispersion compensators, distributed-feedback and distributed-Bragg-reflector lasers [5][6][7][8].…”

Section: Introductionmentioning

confidence: 99%

The Effects of Various Apodization Functions on the Filtering Characteristics of the Grating-Assisted SOI Strip Waveguides

Karimi¹,

Emami²,

Nozhat³

2014

Journal of the Optical Society of Korea

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In this paper, four apodization functions are proposed for silicon-on-insulator (SOI) strip waveguides with sidewall-corrugated gratings. The effects of apodization functions on the full width at half maximum (FWHM), the side-lobe level, and the reflectivity of the reflection spectrum are studied using the coupled-mode theory (CMT) and the transfer-matrix method (TMM). The results show that applying proposed apodization functions creates very good filtering characteristics. Among investigated apodized waveguides, the apodization functions of Polynomial and z-power have the best performance in reducing side-lobes, where the side-lobe oscillations are entirely removed. Four functions are also used for precise adjustment of the bandwidth. Simulation results show that the minimum and maximum values of the FWHM are 0.74 nm and 8.48 nm respectively. In some investigated functions, changing the apodization parameters decreases the reflectivity which is compensated by increasing the grating length.

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Fabrication and characterization of narrow-band Bragg-reflection filters in silicon-on-insulator ridge waveguides

Cited by 143 publications

References 20 publications

Laser erasable implanted gratings for integrated silicon photonics

Laser erasable implanted gratings for integrated silicon photonics

Optical Filters Utilizing Ion Implanted Bragg Gratings in SOI Waveguides

The Effects of Various Apodization Functions on the Filtering Characteristics of the Grating-Assisted SOI Strip Waveguides

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