Fabrication and Characterization of Pb(Zr,Ti)O₃Microcantilever for Resonance Sensors

Abstract

A new thermal neutron beam monitor with a Gas Electron Multiplier (GEM) is developed to meet the needs of the next generation of neutron facilities. A prototype chamber has been constructed with two 100 mm×100 mm GEM foils. Enriched boron-10 is coated on one surface of the aluminum cathode plate as the neutron convertor. 96 channel pads with an area of 8 mm×8 mm each are used for fast signal readout. In order to study the basic characteristics of a boron-coated GEM, several irradiation tests were carried out with α source 239 Pu and neutron source 241 Am(Be). The signal induced by the neutron source has a high signal-to-noise ratio. A clear image obtained from α source 239 Pu is presented, which shows that the neutron beam monitor based on a boron-coated GEM has a good two-dimensional imaging ability. No. 7 ZHOU Jian-Rong et al: Neutron beam monitor based on a boron-coated GEM

Modeling, fabrication and stress compensation of an epitaxial thin film piezoelectric microscale energy scavenging device

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Fabrication of Flat PZT Cantilevers through MEMS Technologies and Application to Optical MEMS

“…Piezoelectric cantilevers using PZT films are widely applied to various kinds of microelectromechanical systems (MEMS) such as optical micro scanners [1][2][3], scanning force microscopes [4,5], resonant sensors [6,7] and RF switches [8]. Among them, micro scanners can play an important role in compact projectors.…”

Pt/Ti Electrodes of PZT Thin Films Patterning by Novel Lift-Off Using ZnO as a Sacrificial Layer

“…PZT is a promising functional material. PZT films have been found to have tremendous opportunities in device applications, such as microelectromechanical systems (MEMSs), [1] sensors, [2,3] uncooled infrared detectors, [4] and ferroelectric random access memory (Fe-RAM) [5] for their superior piezoelectric, pyroelectric and ferroelectric properties. With the development of silicon based piezoelectric micro-microphone recently, PZT films can replace ZnO films as a piezoelectric layer in micro-microphone for their superior piezoelectric properties.…”