Solution-based organic field-effect transistors (OFETs) with low parasitic capacitance have been fabricated using a self-aligned method. The self-aligned processes using a cross-linking polymer gate insulator allow fabricating electrically stable polymer OFETs with small overlap area between the source-drain electrodes and the gate electrode, whose frequency characteristics have been investigated by impedance spectroscopy (IS). The IS of polymer OFETs with self-aligned electrodes reveals frequency-dependent channel formation process and the frequency response in FET structure. key words: organic field-effect transistors, frequency response, selfaligned method, impedance spectroscopy, cross-linking polymer insulators Hiroyoshi Naito received the B.E., M.E. and Dr.Eng. degrees from Osaka Prefecture University in 1979University in , 1981University in , and 1984 He is a Professor in the Department of Physics and Electronics, Osaka Prefecture University. He has been engaged in the photoelectric characterization of disordered semiconductors such as amorphous chalcogenide glasses and of liquid crystalline materials. His current interests are optical and electronic properties of organic semiconductors and their application to optoelectronic devices. Prof. Naito is a member of the Imaging