Fabrication and Characterization of Three-Dimensional Microlens Arrays in Sol-Gel Glass

Orhan, Jean-Baptiste; Parashar, V.K.; Sayah, A.; Gijs, Martinus

doi:10.1109/jmems.2006.879696

Cited by 15 publications

(10 citation statements)

References 31 publications

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“…After loading the substrate at the movable x-y stage, the liquid PU droplets are subsequently jetted into the defined s-domain regions by the DOD microinjector, spontaneously drying under the normal ambient conditions [11]. Finally, the optical performances are characterized along with the measurements of the 2D-to 3D surfaces of the fabricated microstructures [12].…”

Section: Resultsmentioning

confidence: 99%

Polygonal microstructures self-assembled from evaporating picoliter droplets in micro cavities

Chen

Hsu

Chiu

et al. 2010

2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems

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Abstract²We reports the experimental results of the novel polygonal microstructures self-assembled from the evaporating picoliter droplets in micro-scale cavities. Utilizing the inkjet-like method, the drop-on-demand (DOD) droplets of colloidal polymers (Polyurethane, PU 15% in volume) can be precisely positioned into the constrained regions on the polymeric (Polydimethysiloxane, PDMS) substrates which are patterned by current (soft-)lithography technique. The novel various microstructures in polygonal (tri-to hexagonal) forms are created and characterized with specifically optical performances applicable to the potential micro devices such as microlenses and mirrors.

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Section: Resultsmentioning

confidence: 99%

Polygonal microstructures self-assembled from evaporating picoliter droplets in micro cavities

Chen

Hsu

Chiu

et al. 2010

2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems

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“…Thermal reflow on photolithographically‐ or replica‐defined resist structures allows achieving spherical profiles, such as lenses with different shapes [9]. Another approach makes use of polymer drops that are subsequently cross‐linked.…”

Section: Introductionmentioning

confidence: 99%

Inkjet printed SU-8 hemispherical microcapsules and silicon chip embedding

et al. 2013

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Planar lithography techniques are not effective for precise fabrication of microdevices with hemispherical shapes. Drop-on-demand (DOD) inkjet printing (IJP) of photo-curable ink is a more appropriate fabrication approach as it takes advantage of the surface tension as well as of the delivery of a well-defined ink volume. Described is a DOD IJP technique onto geometrically-patterned silicon substrates enabling the controlled fabrication of SU-8 hemispherical microcapsules. Open half capsules of 100 µm in diameter with inner cavity volumes of 5, 20 and 45 pl with a printing yield above 96% are demonstrated. The same technique is directly adapted to the fabrication of microcapsules embedding silicon microchips. The reported findings open new paths for controlled encapsulation of liquids into smart microsystems.

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“…Glass is one of the most suitable materials for integrating microlens with a silicon micro-stage because it offers compatibility with silicon micromachining, much better chemical and radiation resistance, as well as thermal and mechanical stability. There are reports in literature of experimental techniques for fabricating microlens in glass, using ion and dry etching process, hot embossing, sol-gel technology, and laser direct writing based on femtosecond and CO 2 [7][8][9][10][11][12]. Laser writing is in general not currently able to produce microlenses with comparable imaging and stray light properties but has advantages in other aspects that can be of significant practical importance.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of microlens arrays on soda-lima glasses with a Nd:YVO 4 laser

et al. 2011

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We present a laser direct-write technique that is capable of providing microlens arrays on soda-lime glass substrate from one step ablation process, permitting one to shorten the typical times of microlens fabrication with other direct-writing techniques. The technique is based on the combination of a Q-switched Nd:YVO 4 laser and a galvanometer system for addressing the output beam laser. The geometrical and optical parameters of the microlenses have been measured to characterize the microlens arrays produced on an area of 2 mm×2 mm. Focal length values around 118 μm have been obtained by measuring the sag and the diameter of the microlens with a confocal microscope (nondirect method) or directly, using a microscope objective with a CCD camera. The practicality of both methods is shown in the good agreement between the obtained results for the focal length of microlenses. By using a noncontact profilometer, the surface roughness of the microlens has been measured and compared with that of a glass substrate.

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Fabrication and Characterization of Three-Dimensional Microlens Arrays in Sol-Gel Glass

Cited by 15 publications

References 31 publications

Polygonal microstructures self-assembled from evaporating picoliter droplets in micro cavities

Polygonal microstructures self-assembled from evaporating picoliter droplets in micro cavities

Inkjet printed SU-8 hemispherical microcapsules and silicon chip embedding

Fabrication of microlens arrays on soda-lima glasses with a Nd:YVO 4 laser

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