Fabrication and control of thin-film aluminum microheater and nickel temperature sensor

Phatthanakun, Rungrueang; Deekla, P.; Pummara, W.; Sriphung, C.; Pantong, C.; Chomnawang, Nimit

doi:10.1109/ecticon.2011.5947758

Cited by 18 publications

(7 citation statements)

References 4 publications

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“…In the early years of micro-hotplate development, the frequently used materials were those readily available in a CMOS fabrication facility, including polysilicon, aluminum, and gold. 98,99 Eventually it was found that these materials are not ideal since they suffer from electromigration defects and have poor contact properties. Platinum is frequently used as a heating element today due to its ability to deal with high current densities and it being chemically inert at high temperatures.…”

Section: Microheater Designmentioning

confidence: 99%

Review—System-on-Chip SMO Gas Sensor Integration in Advanced CMOS Technology

Filipovic

Lahlalia

2018

J. Electrochem. Soc.

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The growing demand for the integration of functionalities on a single device is peaking with the rise of IoT. We are near to having multiple sensors in portable and wearable technologies, made possible through integration of sensor fabrication with mature CMOS manufacturing. In this paper we address semiconductor metal oxide sensors, which have the potential to become a universal sensor since they can be used in many emerging applications. This review concentrates on the gas sensing capabilities of the sensor and summarizes achievements in modeling relevant materials and processes for these emerging devices. Recent advances in sensor fabrication and the modeling thereof are further discussed, followed by a description of the essential electro-thermal-mechanical analyses, employed to estimate the devices' mechanical reliability. We further address advances made in understanding the sensing layer, which can be modeled similar to a transistor, where instead of a gate contact, the ionosorped gas ions create a surface potential, changing the film's conduction. Due to the intricate nature of the porous sensing films and the reception-transduction mechanism, many added complexities must be addressed. The importance of a thorough understanding of the electro-thermal-mechanical problem and how it links to the operation of the sensing film is thereby highlighted.

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Section: Microheater Designmentioning

confidence: 99%

Review—System-on-Chip SMO Gas Sensor Integration in Advanced CMOS Technology

Filipovic

Lahlalia

2018

J. Electrochem. Soc.

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“…These platinum heaters are stable up to at least 500 ° [10], [11], depending on the adhesion layer used. These thin film microheaters have been widely reported in the literature [10]- [21], and vary from use in biological assays [15]- [17], [19], [20], to reactors or hotplates for single phase purposes [11]- [13], [18], and finally to reactions inside droplets on a microfluidic chip [16], [22]. In these last two cases, this was either achieved in stationary droplets [16], or using bulky heating systems [22].…”

Section: Microheatersmentioning

confidence: 99%

Design and characterization of a microreactor for monodisperse catalytic droplet generation at both elevated temperatures and pressures

Vollenbroek

Bomer

Berg

et al. 2017

2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

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Abstract-We report the fabrication and characterization of a microfluidic droplet microreactor with potential use for single catalyst particle diagnostics. The aim is to capture Fluid Catalytic Cracking (FCC) particles in droplets and perform a probe reaction that results in a fluorescent output signal. The intensity of such a signal can be used as a measure of the catalytic activity of the particle. The microreactor features a droplet generator, platinum (Pt) microheaters, and Pt micro temperature sensors, and is able to operate at pressures up to at least 5 bar. Fluidic channels are etched in a silicon substrate, and platinum heater and sensor structures embedded in the glass cover. We have mapped the temperature inside the microchannels using nanoparticles that show temperature-dependent luminescence. At various spots on the chip, the temperature deviates by 0.86 degrees Celsius close to the Pt sensor and 5.5 degrees Celsius farther away from it. Experiments with making oil-in-water droplets at various temperatures and pressures result in stable droplets up to 100 degrees Celsius at atmospheric pressure. At this temperature, small gas bubbles are formed in the water phase, and then collected by the oil droplets. At a pressure of 5 bar, the droplets are stable up to at least 120 degrees Celsius. E-cat FCC particles were captured in water droplets at a rate of 150 droplets per second.

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“…8 shows the recorded values. Our nonideal laboratory environment makes the measurements a bit noisy, but an increasing trend is (5) clearly visible. The estimated slope and intercept values are summarized again in Table I.…”

Section: Measurement Of the Thermal Parametersmentioning

confidence: 99%

“…This is particularly true when low electrical resistance heaters are used, since parasitics could significantly impact on the measured value. A thin-film aluminum microheater and nickel temperature sensor on a glass slide were adopted in [5], a paper devoted to the design of electronic control circuits. It was demonstrated that ON/OFF feedback control is not suitable for achieving a stable and accurate temperature control, while a PI closed-loop feedback control assured good temperature control in the temperature range between 40°C and 140°C.…”

Section: Introductionmentioning

confidence: 99%

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Thermal Modeling and Characterization of a Thin-Film Heater on Glass Substrate for Lab-on-Chip Applications

Scorzoni

Tavernelli²,

Placidi

et al. 2015

IEEE Trans. Instrum. Meas.

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This paper presents an accurate thermal characterization of thin-film heaters manufactured on glass substrates. The characterization has been performed on Cr/Al/Cr meandered heaters. Techniques commonly adopted for measuring the temperature coefficient of resistance, the thermal resistance and thermal capacitance in the case of Si-based microheaters have been conveniently modified to consider the fundamentally different thermal parameters of a heater manufactured on glass. To reduce power consumption and thermal capacitance, a grating of 250-µm wide trenches, stopped at 80 µm from the opposite metalized front surface, was manufactured on the back side of the heaters, obtaining an increase of the thermal resistance of about 110% and a decrease of the thermal capacitance of about 65% when the glass is in good thermal contact with a heat sink. The measured values of thermal resistance and time constants on a heat sink and in air have been justified starting from realistic physical considerations. Finally, a novel thermal model suitable for microheaters on glass immersed in air was presented and validated by comparing its predictions with the experimental cooling behavior of the microheater and with the predictions of an exponential model.

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Fabrication and control of thin-film aluminum microheater and nickel temperature sensor

Cited by 18 publications

References 4 publications

Review—System-on-Chip SMO Gas Sensor Integration in Advanced CMOS Technology

Review—System-on-Chip SMO Gas Sensor Integration in Advanced CMOS Technology

Design and characterization of a microreactor for monodisperse catalytic droplet generation at both elevated temperatures and pressures

Thermal Modeling and Characterization of a Thin-Film Heater on Glass Substrate for Lab-on-Chip Applications

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