Fabrication and function examination of PZT-based MEMS accelerometers

Lee, Yi–Chia; Tsai, Cheng Che; Li, Cheng Ying; Liou, Yu Cheng; Hong, Cheng Shong; Chu, Sheng Yuan

doi:10.1016/j.ceramint.2021.05.161

Cited by 18 publications

(7 citation statements)

References 17 publications

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“…In Eq (10), a e is the electrothermal noise density (unit: µg/√Hz) at a certain frequency; k b is the Boltzmann constant; T is the temperature in Kelvin; η is the loss factor, which is 0.02 for PVDF 29 ; ω is the angular frequency (unit: Rad/s) of the input acceleration; and Q is the charge sensitivity (unit: pC/g). Using the square of Eq.…”

Section: Device-level Noise Measurement and Analysismentioning

confidence: 99%

“…Moreover, PZT has a 100 times higher dielectric constant than PVDF 4,27 , leading to more significant thermoelectrical noise, as per Eq. (10). As shown in Table 2, the tradeoff for the lower noise in piezoelectric MEMS accelerometers is a reduced bandwidth.…”

Section: Also Used Cantilever-basedmentioning

confidence: 99%

“…Piezoelectric MEMS accelerometers have therefore become popular of late. They provide many advantages over piezoresistive and capacitive couplings, such as higher temperature stability, higher robustness, reduced power consumption, better linear characteristics, wider dynamic range, enhanced sensitivity, and no vacuum sealing requirement [1][2][3][4][5][6][7][8][9][10] . Additionally, when used for implantable hearing aids, piezoelectric accelerometers have the potential to directly interface with neurons, eliminating the need for extra readout circuits [5][6][7] .…”

Section: Introductionmentioning

confidence: 99%

“…Moreover, all these inorganic materials, regardless of their piezoelectric properties and environmental impacts, are used in MEMS fabrication flow based on similar methodologies. Being either bottom-to-top surface micromachinings or top-tobottom bulk micromachinings 4,8,10,[13][14][15] , these microfabrication flows all inevitably repeat the three-step cycle of material deposition, masking lithography, and anisotropic etching, leading to almost identical process complexity. If a design opts for reduced performance for environmental benefits, then a simpler fabrication process should at least be expected to make the tradeoff worthwhile.…”

Section: Introductionmentioning

confidence: 99%

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A polymeric piezoelectric MEMS accelerometer with high sensitivity, low noise density, and an innovative manufacturing approach

Ge,

Cretu

2023

Microsyst Nanoeng

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The piezoelectric coupling principle is widely used (along with capacitive coupling and piezoresistive coupling) for MEMS accelerometers. Piezoelectric MEMS accelerometers are used primarily for vibration monitoring. Polymer piezoelectric MEMS accelerometers offer the merits of heavy-metal-free structure material and simple microfabrication flow. More importantly, polymeric piezoelectric MEMS accelerometers may be the basis of novel applications, such as fully organic inertial sensing microsystems using polymer sensors and organic integrated circuits. This paper presents a novel polymer piezoelectric MEMS accelerometer design using PVDF films. A simple and rapid microfabrication flow based on laser micromachining of thin films and 3D stereolithography was developed to fabricate three samples of this design. During proof-of-concept experiments, the design achieved a sensitivity of 21.82 pC/g (equivalent open-circuit voltage sensitivity: 126.32 mV/g), a 5% flat band of 58.5 Hz, and a noise density of 6.02 µg/√Hz. Thus, this design rivals state-of-the-art PZT-based counterparts in charge sensitivity and noise density, and it surpasses the performance capabilities of several commercial MEMS accelerometers. Moreover, this design has a 10-times smaller device area and a 4-times larger flat band than previous state-of-the-art organic piezoelectric MEMS accelerometers. These experimentally validated performance metrics demonstrate the promising application potential of the polymeric piezoelectric MEMS accelerometer design presented in this article.

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Section: Device-level Noise Measurement and Analysismentioning

confidence: 99%

Section: Also Used Cantilever-basedmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

A polymeric piezoelectric MEMS accelerometer with high sensitivity, low noise density, and an innovative manufacturing approach

Ge,

Cretu

2023

Microsyst Nanoeng

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show abstract

“…The results indicated that a higher voltage output can be achieved with a smaller filling and electrode interspace. Recently, in 2021, Lee et al [ 23 ] proposed and fabricated a piezoelectric MEMS accelerometer on Si substrates using photolithography and sol-gel PNZT. The accelerometer exhibited a sensitivity of 16.8 mV/g at 200 Hz.…”

Section: Introductionmentioning

confidence: 99%

High-Sensitivity Piezoelectric MEMS Accelerometer for Vector Hydrophones

Shi

Kang

et al. 2023

Micromachines

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In response to the growing demand for high-sensitivity accelerometers in vector hydrophones, a piezoelectric MEMS accelerometer (PMA) was proposed, which has a four-cantilever beam integrated inertial mass unit structure, with the advantages of being lightweight and highly sensitive. A theoretical energy harvesting model was established for the piezoelectric cantilever beam, and the geometric dimensions and structure of the microdevice were optimized to meet the vibration pickup conditions. The sol-gel and annealing technology was employed to prepare high-quality PZT thin films on silicon substrate, and accelerometer microdevices were manufactured by using MEMS technology. Furthermore, the MEMS accelerometer was packaged for testing on a vibration measuring platform. Test results show that the PMA has a resonant frequency of 2300 Hz. In addition, there is a good linear relationship between the input acceleration and the output voltage, with V = 8.412a − 0.212. The PMA not only has high sensitivity, but also has outstanding anti-interference ability. The accelerometer structure was integrated into a vector hydrophone for testing in a calibration system. The results show that the piezoelectric vector hydrophone (PVH) has a sensitivity of –178.99 dB@1000 Hz (0 dB = 1 V/μPa) and a bandwidth of 20~1100 Hz. Meanwhile, it exhibits a good “8” shape directivity and consistency of each channel. These results demonstrate that the piezoelectric MEMS accelerometer has excellent capabilities suitable for use in vector hydrophones.

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Enabling Distributed Intelligence with Ferroelectric Multifunctionalities

et al. 2021

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Distributed intelligence involving a large number of smart sensors and edge computing are highly demanded under the backdrop of increasing cyber-physical interactive applications including internet of things. Here, the progresses on ferroelectric materials and their enabled devices promising energy autonomous sensors and smart systems are reviewed, starting with an analysis on the basic characteristics of ferroelectrics, including high dielectric permittivity, switchable spontaneous polarization, piezoelectric, pyroelectric, and bulk photovoltaic effects. As sensors, ferroelectrics can directly convert the stimuli to signals without requiring external power supply in principle. As energy transducers, ferroelectrics can harvest multiple forms of energy with high reliability and durability. As capacitors, ferroelectrics can directly store electrical charges with high power and ability of pulse-mode signal generation. Nonvolatile memories derived from ferroelectrics are able to realize digital processors and systems with ultralow power consumption, sustainable operation with intermittent power supply, and neuromorphic computing. An emphasis is made on the utilization of the multiple extraordinary functionalities of ferroelectrics to enable material-critical device innovations. The ferroelectric characteristics and synergistic functionality combinations are invaluable for realizing distributed sensors and smart systems with energy autonomy.

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Fabrication and function examination of PZT-based MEMS accelerometers

Cited by 18 publications

References 17 publications

A polymeric piezoelectric MEMS accelerometer with high sensitivity, low noise density, and an innovative manufacturing approach

A polymeric piezoelectric MEMS accelerometer with high sensitivity, low noise density, and an innovative manufacturing approach

High-Sensitivity Piezoelectric MEMS Accelerometer for Vector Hydrophones

Enabling Distributed Intelligence with Ferroelectric Multifunctionalities

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