Fabrication and mechanical properties of tungsten carbide thin films via mist chemical vapor deposition

Ikenoue, Takumi; Yoshida, Takuji; Miyake, Masao; Kasada, Ryuta; Hirato, Tetsuji

doi:10.1016/j.jallcom.2020.154567

Cited by 12 publications

(5 citation statements)

References 37 publications

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“…When the temperature is higher than 650 °C, WC 1-x begins to form, and with the increase in preparation temperature, the element ratio of C/W is gradually close to 1. Mechanical characterization shows that the hardness and Young's modulus of WC 1-x films grown at 750 °C are 25 and 409 GPa, respectively [97]. Atomic layer deposition has also been used to prepare NbC thin films by employing NbF 5 and NbCl 5 as the raw materials, TMA as a carbon source and reducing agent.…”

Section: Chemical Vapor Depositionmentioning

confidence: 99%

Recent Progress in Emerging Two-Dimensional Transition Metal Carbides

et al. 2021

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As a new member in two-dimensional materials family, transition metal carbides (TMCs) have many excellent properties, such as chemical stability, in-plane anisotropy, high conductivity and flexibility, and remarkable energy conversation efficiency, which predispose them for promising applications as transparent electrode, flexible electronics, broadband photodetectors and battery electrodes. However, up to now, their device applications are in the early stage, especially because their controllable synthesis is still a great challenge. This review systematically summarized the state-of-the-art research in this rapidly developing field with particular focus on structure, property, synthesis and applicability of TMCs. Finally, the current challenges and future perspectives are outlined for the application of 2D TMCs.

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Section: Chemical Vapor Depositionmentioning

confidence: 99%

Recent Progress in Emerging Two-Dimensional Transition Metal Carbides

et al. 2021

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“…[83] Moreover, in the CVD preparation technique, expediting the carburization process is achieved by employing hydrogen and hydrocarbon vapor reduction precursors. [84][85][86] In this procedure, gaining fine powder of tungsten carbide remains, although this methodology offers reasonable control over size, crystal structure, and shape. W 2 C cannot be converted into WC entirely due to rapidity of carburization reaction procedure and formed intermediate.…”

Section: Preparation Approaches Of Pure Phase Wcmentioning

confidence: 99%

“…Prolonged sintering processes can destroy the material‘s crystal structure, resulting in increased structural distortions and defects [83] . Moreover, in the CVD preparation technique, expediting the carburization process is achieved by employing hydrogen and hydrocarbon vapor reduction precursors [84–86] . In this procedure, gaining fine powder of tungsten carbide remains, although this methodology offers reasonable control over size, crystal structure, and shape.…”

Section: Preparation Approaches Of Pure Phase Wcmentioning

confidence: 99%

Tungsten Carbide‐Based Materials for Electrocatalytic Water Splitting: A Review

Rafique,

Fu,

Han

et al. 2024

ChemElectroChem

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Hydrogen has garnered considerable attention as an environmentally friendly due to its sustainability and exceptional energy density, surpassing other chemical fuels. For H2 production, electrochemical water splitting is an economically viable and eco‐friendly method. Developing well‐organized electrocatalysts for electrochemical water splitting is pivotal in enabling long‐term hydrogen production, the critical component in the transition toward a cleaner and more environmentally sustainable energy landscape. During the last decades, to aid in oxygen evolution and hydrogen evolution reactions, numerous tungsten carbide‐based electrocatalysts have been established. WC developed as a promising candidate for electrolytic hydrogen generation. This review first explores the historical background and fundamental mechanisms underlying water splitting and subsequently investigates the field of WC‐based electrocatalysts. Furthermore, in both HER and OER, the thorough analysis examines the electrocatalytic performance of electrocatalysts based on WC. Finally, it discusses the challenges and prospects of developing WC‐based electrocatalysts for OER and HER, shedding light on their potential contributions to the sustainable energy landscape.

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“…Существует множество методов получения карбида вольфрама: химическое осаждение из паровой фазы [17] и искровое плазменное спекание [18], карботермическое восстановление оксида вольфрама WO 3 и сопутствующая карбонизация [19], высокоэнергетическое перемалывание в шаровых мельницах [20], плазменно-пучковые методы [21], обработка поверхности высокоинтенсивными ионными пучками [22], электрический взрыв проводников [23]. Все они зачастую реализуются с использованием чистого вольфрама в качестве прекурсора или его оксида, которые уже были получены из вольфрамовой руды.…”

Section: Introductionunclassified

Influence of non-vacuum electric arc synthesis energy on the product of tungsten ore concentrate processing

Pak,

Kokorina,

Shanenkova

et al. 2024

IZVESTIYA

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Relevance. Caused by the problem of developing methods for obtaining tungsten carbide, especially from tungsten-containing waste. As a solution, a non-vacuum electric arc method is proposed. It is easy to operate and cheap compared to a direct analogue (arc discharge method in inert gas atmosphere). The resulting product can be used as a catalyst carrier in hydrogen production reactions. Aim. To determine the current and the energy entered in the system, necessary to obtain a product with a largest proportion of the hexagonal phase of tungsten carbide WC from tungsten ore concentrate by a non-vacuum electric arc method and investigate a sample with the largest proportion of tungsten carbide phase. Object. Electric arc synthesis in open air from tungsten ore concentrate. Methods. Grinding in a SAMPLE SPEX 8000M ball mill, magnetic separation, non-vacuum electric arc method of synthesis, X-ray phase analysis on a Shimadzu XRD 7000s X-ray diffractometer (λ=1.54060 Å), scanning electron microscopy combined with X-ray fluorescence energy-dispersive analysis based on a TESCAN VEGA 3 microscope SBU with OXFORD X-Max prefix, transmission electron microscopy combined with energy dispersive spectroscopy and selected area electron diffraction based on the JEM-2100F microscope, scanning electron-ion microscopy based on the QUANTA 200 3D microscope. Results. The authors have built the dependence of the phase composition of the product of non-vacuum electric arc synthesis at current strengths from 50 to 220 A. Mass fraction of each of the identified phases in the synthesis product was determined using the reference intensity ratio. The current and the energy entered in the system, which provide the largest proportion of tungsten carbide WC in the synthesis product, are determined. The authors studied the product containing the largest proportion of tungsten carbide WC using scanning and transmission electron microscopy methods.

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Fabrication and mechanical properties of tungsten carbide thin films via mist chemical vapor deposition

Cited by 12 publications

References 37 publications

Recent Progress in Emerging Two-Dimensional Transition Metal Carbides

Recent Progress in Emerging Two-Dimensional Transition Metal Carbides

Tungsten Carbide‐Based Materials for Electrocatalytic Water Splitting: A Review

Influence of non-vacuum electric arc synthesis energy on the product of tungsten ore concentrate processing

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