Fabrication and mechanical study of a titanium micro-membrane for in vivo pressure monitoring

Becan, G.; Philippe, Hadrien; Phung, J.; Laudrel, Edouard; Boutaud, Bertrand; Isac, N.; Woytasik, Marion; Lefeuvre, Élie

doi:10.1109/ismict48699.2020.9152743

Cited by 4 publications

(5 citation statements)

References 20 publications

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“…Experimental considerations indicated that the initial hypothesis that the obtained membranes are of uniform thicknesses is actually not accurate [28]. The etching profile of the membranes can be approximated by an elliptic shape.…”

Section: Mechanical Modelling Of the Membranementioning

confidence: 97%

“…After fabrication, one obtains 15 µm-thick membranes with elliptic profile and 45 µm-thick mesas. As membranes are not perfectly flat and not of uniform in thickness, assumptions for (1) and (2) need to be adjusted [28]. A mechanical FEM study was carried out with ANSYS 18.2 to find S m,FEA , the effective mechanical sensibility considering the elliptic thickness shape of the membrane to the deflection [28].…”

Section: Actual Thickness Profile Of the Membranementioning

confidence: 99%

“…As membranes are not perfectly flat and not of uniform in thickness, assumptions for (1) and (2) need to be adjusted [28]. A mechanical FEM study was carried out with ANSYS 18.2 to find S m,FEA , the effective mechanical sensibility considering the elliptic thickness shape of the membrane to the deflection [28]. Finding S m,FEA can be considered as equivalent to replacing t in (2) by an effective constant thickness.…”

Section: Actual Thickness Profile Of the Membranementioning

confidence: 99%

“…The elliptic parameters defining the actual shape were estimated from cross-section inspection. The semiminor axis was evaluated at 60 µm [28]. The major axis corresponds to the opening of the etching.…”

Section: Actual Thickness Profile Of the Membranementioning

confidence: 99%

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A grade 1 titanium capacitive microsensor for continuous pressure monitoring of intracorporal pressures

Becan¹,

Philippe²,

Phung³

et al. 2021

J. Micromech. Microeng.

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Long-term implantable pressure monitoring is a key clinical parameter bringing a lot to clinicians by helping them treating many chronical diseases (e.g. glaucoma, hydrocephalus or heart failure). However for decades and up to now, most of the implantable sensors exhibited poor technological and clinical success due to the long-term biocompatibility constraints of the transducing part. The prime novelty of this paper is to propose a functional implantable MEMS pressure sensor with a bulk-micromachined titanium (Ti) transducer. Thanks to its small size, the active part of the sensor is thought versatile enough to be integrated in an active implantable device for measuring various intracorporal pressures. The transducer is made out of grade 1 Ti, which is one of the metalic materials of choice to insure long-term biocompatibility and has been proved to be a reliable material in the implantable industry. The uniqueness of the proposed sensor comes from its micromachining. The transducer, including a bulk titanium membrane, has been obtained through subtractive machining techniques benefiting from the extensive research experience on silicon MEMS. This Ti-based technology avoids the use of additionnal costly, complex and bulky encapsulation step to get a biocompatible device, thus enabling higher miniaturization level of implantable devices and lower rate of long term drift risks thanks to its monolithic architecture. The presented Ti MEMS sensor exhibits 1 fF mmHg−1 sensitivity within a clinically relevant pressure range of 0–300 mmHg, which is compatible with off the shelf low-power readout electronics.

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Section: Mechanical Modelling Of the Membranementioning

confidence: 97%

Section: Actual Thickness Profile Of the Membranementioning

confidence: 99%

Section: Actual Thickness Profile Of the Membranementioning

confidence: 99%

Section: Actual Thickness Profile Of the Membranementioning

confidence: 99%

See 2 more Smart Citations

A grade 1 titanium capacitive microsensor for continuous pressure monitoring of intracorporal pressures

Becan¹,

Philippe²,

Phung³

et al. 2021

J. Micromech. Microeng.

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show abstract

“…The vast majority of MEMS devices rely on compliant elements such as beams [11] or membranes [12]. We consider here several configurations of beams with rectangular sections and we assess the ability of a given configuration to constrain motion.…”

Section: Spring Designmentioning

confidence: 99%

Design and Simulation of an Electrostatic Energy Harvester for Biomedical Implants

Ambia

Chavez

Lallart

et al. 2021

2021 Symposium on Design, Test, Integration &Amp; Packaging of MEMS and MOEMS (DTIP)

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This paper presents the design of an electrostatic MEMS energy harvester for medical implant application. It examines solutions for constraining the motion of the mobile part in one direction and proposes an innovative spring architecture. Indeed, constraining the mobile part motion is essential to avoid undesired contact between comb electrodes. It is particularly important in environments in which mechanical vibrations result from complex combination of rotations and translations. The objective of the considered device is to power the next generation of leadless pacemakers using mechanical energy generated by heartbeat motion. Such solution would dramatically increase the lifetime of implants and would be very beneficial for the patients by reducing the number of replacement surgical operations. Numerical simulations based on analytical modelling and acceleration signal mimicking heartbeat motion enabled to analyze the system response in various condition, showing the interest and benefits of the proposed approach.

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Mechanical comparison between two titanium micro membranes for in vivo pressure monitoring

Becan¹,

Phung²,

Philippe³

et al. 2020

2020 Symposium on Design, Test, Integration &Amp; Packaging of MEMS and MOEMS (DTIP)

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Fabrication and mechanical study of a titanium micro-membrane for in vivo pressure monitoring

Cited by 4 publications

References 20 publications

A grade 1 titanium capacitive microsensor for continuous pressure monitoring of intracorporal pressures

A grade 1 titanium capacitive microsensor for continuous pressure monitoring of intracorporal pressures

Design and Simulation of an Electrostatic Energy Harvester for Biomedical Implants

Mechanical comparison between two titanium micro membranes for in vivo pressure monitoring

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