2019
DOI: 10.1088/1748-0221/14/09/p09004
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Fabrication and performance of AC-coupled LGADs

Abstract: A: Detectors that can simultaneously provide fine time and spatial resolution have attracted wide-spread interest for applications in several fields such as high-energy and nuclear physics as well as in low-energy electron detection, photon science, photonics and imaging. Low-Gain Avalanche Diodes (LGADs), being fabricated on thin silicon substrates and featuring a charge gain of up to 100, exhibit excellent timing performance. Since pads much larger than the substrate thickness are necessary to achieve a spat… Show more

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Cited by 55 publications
(30 citation statements)
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“…LGADs) [1,2] are a new generation of silicon devices optimized for high-precision 4D tracking and conceived for experiments at future colliders. They are n-in-p sensors based on the LGAD technology with two additional key features (Fig.…”
Section: Ac-coupled Low Gain Avalanche Diodes (Ac-mentioning
confidence: 99%
See 1 more Smart Citation
“…LGADs) [1,2] are a new generation of silicon devices optimized for high-precision 4D tracking and conceived for experiments at future colliders. They are n-in-p sensors based on the LGAD technology with two additional key features (Fig.…”
Section: Ac-coupled Low Gain Avalanche Diodes (Ac-mentioning
confidence: 99%
“…Fig. 17, plot on the left, shows how the temporal resolution of a single pad changes as a function of the delay parameter 𝛾, for three different geometries from the same wafer; the plot on the right shows how the optimized delay parameter depends linearly on the ratio (𝑚𝑒𝑡𝑎𝑙∕𝑝𝑖𝑡𝑐ℎ) 2 . This fact is an indication that the geometrical properties of a given design, and not just the 𝑛 + resistivity, play a role in the delay.…”
Section: Measurement Of the Timing Resolutionmentioning
confidence: 99%
“…Two different designs based on the same AC-coupled concept but different read-out pad layouts will be discussed. Some AC-coupled prototypes were fabricated at BNL [13]. One of these devices, a strip-like AC-Fig.…”
Section: Ac-lgadmentioning
confidence: 99%
“…The AC-LGAD sensor studied in this article was fabricated at BNL, using a class-100 silicon processing facility, following the process outlined in Ref. [12]. Figure 1 shows the cross-section of a segmented AC-LGAD sensor.…”
Section: The Ac-lgad Sensormentioning
confidence: 99%