Fabrication and Performance of Lobster Eye X-Ray Micro Pore Optics with the Ultra-high Aspect Ratio

Abstract

Since the idea of bionic Lobster eye micropore optics was put forward, the possibility of focusing hard X-rays by this new lightweight X-ray optics has been proposed. Limited by the technological conditions of the aspect ratio (≥500), low surface roughness (≤1 nm) and the difficulty of applying metal coatings inside such narrow square channels, the high quality of these new optics have not been realized. This work demonstrates the test results for an Ultra-high aspect ratio (500:1) of iridium-coated with microchannel plate technology and atomic layer deposition technology. The sidewalls of the square channel are smoothed with a special acid-base treatment and the Root-Mean-Square of the inner wall was 0.52 ± 0.1 nm in 3 μm × 3 μm scale roughness, such that they work well as X-ray mirrors. The thickness of the metal iridium film layer was 19 nm. At the working voltage of 2 kV, the current was 0.1 mA and the angular resolution of the slumped chip in horizontal and vertical directions was 3.′9 and 4.′2, respectively. The simulation results were in good agreement with the X-ray test results.