Abstract:High‐quality ZnO film has been successfully grown on 2 inch c‐plane sapphire substrate using Zn(DPM)2 and O2 as zinc and oxygen sources by a solution‐vaporizing MOCVD technique. All films deposited at the substrate temperatures of 680 ∼ 760 °C were preferentially oriented along the (0001) direction and increasing the substrate temperature the full width at half maximum (FWHM) of the (0002) peak was decreased, as the crystallinity is improved. At the optimized substrate temperature of 740 °C the film showed the… Show more
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