Fabrication and reliability study of a double spiral platinum-based MEMS hotplate

Prasad, Mahanth; Arya, Dhairya Singh; Khanna, Vinod Kumar

doi:10.1117/1.jmm.14.2.025003

Cited by 14 publications

(12 citation statements)

References 0 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…For front-side fabrication, there are two main methods to etch the hole, one of which is the use of highly selective wet chemical etchants such as potassium hydroxide (KOH), 69 ethylenediamine pyrocatechol (EDP), 67 or tetramethylammonium hydroxide (TMAH). 70 These etchants require the use of a silicon nitride or silicon oxide films as etch-stop layers. 71 The wet chemical etching technique is very expensive and low-cost alternatives are sought after.…”

Section: Semiconductor Metal Oxide Sensorsmentioning

confidence: 99%

“…96 The membrane, which surrounds the microheater, is usually comprised of some combination of silicon dioxide (SiO 2 ) and silicon nitride (Si 3 N 4 ). 70,78,97 The membrane is important in providing a platform on which the microheater and sensing film are suspended. Recent interest in SiC based microheaters stray from the typical SiO 2 /Si 3 N 4 stack, but their fabrication is very complex and thereby also cost intensive.…”

Section: Microheater Designmentioning

confidence: 99%

See 1 more Smart Citation

Review—System-on-Chip SMO Gas Sensor Integration in Advanced CMOS Technology

Filipovic

Lahlalia

2018

J. Electrochem. Soc.

View full text Add to dashboard Cite

The growing demand for the integration of functionalities on a single device is peaking with the rise of IoT. We are near to having multiple sensors in portable and wearable technologies, made possible through integration of sensor fabrication with mature CMOS manufacturing. In this paper we address semiconductor metal oxide sensors, which have the potential to become a universal sensor since they can be used in many emerging applications. This review concentrates on the gas sensing capabilities of the sensor and summarizes achievements in modeling relevant materials and processes for these emerging devices. Recent advances in sensor fabrication and the modeling thereof are further discussed, followed by a description of the essential electro-thermal-mechanical analyses, employed to estimate the devices' mechanical reliability. We further address advances made in understanding the sensing layer, which can be modeled similar to a transistor, where instead of a gate contact, the ionosorped gas ions create a surface potential, changing the film's conduction. Due to the intricate nature of the porous sensing films and the reception-transduction mechanism, many added complexities must be addressed. The importance of a thorough understanding of the electro-thermal-mechanical problem and how it links to the operation of the sensing film is thereby highlighted.

show abstract

Section: Semiconductor Metal Oxide Sensorsmentioning

confidence: 99%

Section: Microheater Designmentioning

confidence: 99%

Review—System-on-Chip SMO Gas Sensor Integration in Advanced CMOS Technology

Filipovic

Lahlalia

2018

J. Electrochem. Soc.

View full text Add to dashboard Cite

show abstract

“…Yet, modern environmental microscopes can still only be operated at pressures up to approximately 25 mbar in the sample region. Microelectromechanical system (MEMS) based gas cell TEM holders have been developed recently to investigate functional materials at elevated pressures (Creemer et al, 2009(Creemer et al, , 2011Allard et al, 2012;Prasad et al, 2015;Garza et al, 2017). MEMS-based nanoreactors allow for pressures up to 14 bar (Creemer et al, 2011) and temperatures up to 1,300°C (Garza et al, 2017).…”

Section: Introductionmentioning

confidence: 99%

Versatile Homebuilt Gas Feed and Analysis System for Operando TEM of Catalysts at Work

et al. 2020

View full text Add to dashboard Cite

Understanding how catalysts work during chemical reactions is crucial when developing efficient catalytic materials. The dynamic processes involved are extremely sensitive to changes in pressure, gas environment and temperature. Hence, there is a need for spatially resolved operando techniques to investigate catalysts under working conditions and over time. The use of dedicated operando techniques with added detection of catalytic conversion presents a unique opportunity to study the mechanisms underlying the catalytic reactions systematically. Herein, we report on the detailed setup and technical capabilities of a modular, homebuilt gas feed system directly coupled to a quadrupole mass spectrometer, which allows for operando transmission electron microscopy (TEM) studies of heterogeneous catalysts. The setup is compatible with conventional, commercially available gas cell TEM holders, making it widely accessible and reproducible by the community. In addition, the operando functionality of the setup was tested using CO oxidation over Pt nanoparticles.

show abstract

“…The recent development of more robust MEMS devices and nanoreactors gives rise to new opportunities for in situ/operando transmission electron microscopy (TEM) studies of heterogeneous catalysts [1,2]. These MEMS-based nanoreactors allow characterization of catalysts' active state under relevant conditions, at pressures up to 15 bar and temperatures up to 1000 °C [3][4][5].…”

mentioning

confidence: 99%