Fabrication and testing of polymer cantilevers for VOC sensors

Shiraishi, Naoki; Ikehara, Tsuyoshi; Dao, Dzung Viet; Saito, Susumu; Ando, Yasuhisa

doi:10.1016/j.sna.2013.01.011

Cited by 26 publications

(13 citation statements)

References 16 publications

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“…In order to improve the sensitivity further, we believe that miniaturization of the PC cantilever will be effective. Our investigations into the dynamic properties of the polymer cantilevers support the feasibility of miniaturization of the PC cantilever (Shiraishi, et al, 2013). Furthermore, titanium oxide, a material with a large distribution factor can be applied as an adsorption layer (Kimura, et al, 2012).…”

Section: Discussionsupporting

confidence: 59%

“…Our investigations into the dynamic properties of polymer cantilevers support the feasibility of polymer-based cantilever sensors for VOC monitoring (Shiraishi, et al, 2013). We have looked at both the size-and mode-dependencies of the resonant frequencies and quality factors of the polycarbonate (PC) cantilevers under atmospheric pressure.…”

mentioning

confidence: 83%

“…7 shows, the resonant frequencies depend on the vibration mode. The resonant frequency tends to increase in step with increases in the vibration mode (Shiraishi, et al, 2013). The quality factor were calculated at each resonance peak and shown in Fig.…”

Section: Evaluation Of Dynamic Characteristics Of Cantilever Sensor Umentioning

confidence: 99%

“…The quality factors of a polymer cantilevers are affected by the volume loss mechanism and support loss mechanism. Especially, the quality factors in higher order resonance mode depend on the support loss (Shiraishi, et al, 2013). The quality factors for support loss in micro-machined clamped-free beam cantilevers with length L and thickness T are expressed (Shiraishi, et al, 2013) as,…”

Section: Evaluation Of Dynamic Characteristics Of Cantilever Sensor Umentioning

confidence: 99%

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Basic characteristics of polycarbonate-based dual cantilever sensors for detecting VOC

Shiraishi

Kimura

Ando

2014

Mechanical Engineering Journal

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Section: Discussionsupporting

confidence: 59%

mentioning

confidence: 83%

Section: Evaluation Of Dynamic Characteristics Of Cantilever Sensor Umentioning

confidence: 99%

Section: Evaluation Of Dynamic Characteristics Of Cantilever Sensor Umentioning

confidence: 99%

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Basic characteristics of polycarbonate-based dual cantilever sensors for detecting VOC

Shiraishi

Kimura

Ando

2014

Mechanical Engineering Journal

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“…Stable and robust natures of silicon-based materials, however, may result in limited responses upon the change of external stimuli such as temperature [9] and pressure and require additional responsive materials coated or deposited for capturing specific targets. Materials used in seminal exemplary works include SU-8 photoresist, [14][15][16][17][18] polystyrene, [19] polyimide, [20] polymethylmethacrylate (PMMA), polycarbonate (PC), [21] polypropylene, polyvinylidenfluoride, [22] poly(L-lactide), [23] hexanediol diacrylate, [24] poly(vinylidenefluoride/trifluoroethylene), [25] polyethylene terephthalate, [26] and polydimethylsiloxane (PDMS). Therefore, many researchers have been naturally seeking alternative materials to make resonators used for sensing applications.…”

Section: Introductionmentioning

confidence: 99%

Hydrogel Microelectromechanical System (MEMS) Resonators: Beyond Cost‐Effective Sensing Platform

Yoon

Chae

Thundat

et al. 2019

Adv Materials Technologies

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Mechanical resonators have been used for various applications including timing references, filters, accelerometers, and inertial sensors. Mostly, silicon‐based materials have been thought to be ideal considering robustness and stability and thus used to fabricate micro and nanoscale mechanical resonators. When enhanced sensitivity becomes more important than long‐term stability, materials repertoires other than silicon might be better suited. Herein, a novel manufacturing approach is proposed, which rapidly fabricates microelectromechanical system resonators with hydrogel by single UV exposure via dynamic mask and dry‐state “plugging out” sacrificial process where hydrogel structures are defined by spatially modulated UV light. For practical demonstrations, rectangular cantilevers and closed circular membranes are employed for humidity and pressure sensing applications, respectively. The cost‐effective fabrication route suggested herein not only enables rapid prototyping of suspended hydrogel structures outside a cleanroom, but also offers spatially tunable elastic modulus. Most remarkably, sensitivity enhancement resulting from high swelling rate and/or low elastic modulus exceeds stability deterioration, one of the major concerns for polymeric materials. Such exclusive beneficial features, yet demonstrated with any microfabrication materials and methods or their combinations, open a new avenue for photocurable polymeric materials to be used for specific applications as well as fundamental investigations.

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3D Printed Metallic Pillar Nanomechanical Resonators Decorated with TiO₂ Nanotubes for Highly Sensitive Environmental Applications

Lamberti,

Laurenti,

Manfredi

et al. 2024

Adv Materials Technologies

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Micro and nanomechanical devices offer enhanced sensing capabilities for detecting biological and chemical small molecules. However, miniaturization necessitates advanced fabrication processes and complex measurement systems, hindering routine sensor analysis. While alternative methods like 3D printing show promise, challenges such as low device resolution persist due to intrinsic damping of polymer inks. In this study, an array of micrometric pillar resonators is fabricated in Ti6Al4 V alloy using additive manufacturing based on laser powder bed fusion technology. These metallic nanomechanical resonators exhibit a very high quality factor with minimal difference between air and vacuum measurements due to low intrinsic damping. Furthermore, titania nanotubes grown on the pillars via anodic oxidation heighten sensitivity for molecular dye degradation evaluation. Leveraging the weak coupling phenomenon among the pillars in the array, these devices facilitate large‐scale parallelized measurements, here demonstrated with real‐time analysis of dye degradation process. This approach to creating mass sensing devices via metallic additive manufacturing can usher in a new generation of highly performing resonating sensor arrays, offering a cost‐effective and efficient alternative to traditional silicon microfabrication methods.

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Fabrication and testing of polymer cantilevers for VOC sensors

Cited by 26 publications

References 16 publications

Basic characteristics of polycarbonate-based dual cantilever sensors for detecting VOC

Basic characteristics of polycarbonate-based dual cantilever sensors for detecting VOC

Hydrogel Microelectromechanical System (MEMS) Resonators: Beyond Cost‐Effective Sensing Platform

3D Printed Metallic Pillar Nanomechanical Resonators Decorated with TiO₂ Nanotubes for Highly Sensitive Environmental Applications

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Fabrication and testing of polymer cantilevers for VOC sensors

Cited by 26 publications

References 16 publications

Basic characteristics of polycarbonate-based dual cantilever sensors for detecting VOC

Basic characteristics of polycarbonate-based dual cantilever sensors for detecting VOC

Hydrogel Microelectromechanical System (MEMS) Resonators: Beyond Cost‐Effective Sensing Platform

3D Printed Metallic Pillar Nanomechanical Resonators Decorated with TiO2 Nanotubes for Highly Sensitive Environmental Applications

Contact Info

Product

Resources

About

3D Printed Metallic Pillar Nanomechanical Resonators Decorated with TiO₂ Nanotubes for Highly Sensitive Environmental Applications