Fabrication and testing of the planar magnetic micromotor

Abstract

Planar micromotors have the potential for high-speed control applications. These systems require closed loop control and therefore involve not only the motor but also associated high-speed control circuitry. Electrostatic devices with submicron gaps and CMOS controllers offer one possible construction technique. Magnetic motors with bipolar microelectronics are an attractive alternative. Magnetic micromotors have been constructed by using deep X-ray lithography and metal plating with a modified LIGA process. The devices are designed as reluctance motors and consist of a stator that is rigidly attached to the substrate and a rotor that is fabricated as a fully released, free part. Both pieces are formed from nickel and are typically 100 mu m in thickness. The rotor is assembled onto the stator shaft with submicron tolerances. The structure is driven by an external rotating magnet or a fixed electromagnet. Rotational speeds of up to 8000 rpm have been obtained and maintained for several days.

Magnetic microactuation of polysilicon flexure structures

“…Using the moment-of-inertia of a beam with a trapezoidal cross section [17], the angular deflection in Eq. (1) can be expressed as (2) with beam thickness h, upper-beam width a, and lowerbeam width b. Equation 2is useful for determining the torque T from observation of the angular mechanical deflection φ.…”

“…I. INTRODUCTION AGNETIC microactuation has recently been demonstrated by several research groups [1][2][3][4][5][6]. In most cases magnetic-microactuator fabrication is not accomplished in a continuous batch process, but rather with the addition of steps such as manual assembly.…”

Multimodal chemo-/magneto-/phototaxis of 3G CNT-bots to power fuel cells

“…For example, over the past few decades, a host of organic 17,18 , inorganic 4,[19][20][21] and composite selfpropellers have shown improved propulsion under various excitations, such as photonic excitation 22 , concentration gradients 23,24 , surface tension gradients 25,26 and electric 27,28 , magnetic 29 or acoustic 30,31 fields. In this regard, the existing literature suggests that, while firstgeneration (1G) motors were synthesised to identify the roles of the materials 32 , size reduction and transport properties 33 in diverse locomotive behaviour, the major focus during the fabrication of second-generation (2G) locomotives has been functionality, directionality 34 and biocompatibility 35 . The recent emphasis on the design and development of third-generation (3G) motors is directed towards achieving control over multimodal directional transports suitable for scalable diverse energy 36 , environmental 7,[35][36][37][38] and healthcare applications 10,39 .…”

Rapid Prototyping of a Micromotor with an Optical Rotary Encoder

“…In 1990, Mehregany et al [ 2 ] processed electrostatic wobble micromotors (variable-capacitance side-drive motors) using silicon-based processes. In 1991, Guckel et al [ 3 ] applied the X-ray lithography and electroforming processes to the fabrication of microreluctance motors. In 1993, Guckel et al [ 4 ] manufactured a 0.285 mm diameter reluctance rotor and used photodiodes to detect its rotational speed.…”