Fabrication, characterisation and modelling of fast flexible semiconductor nanomembrane electronics

Qin, Guoxuan; Tu, Guoping; Cai, Tianhao; Ma, Jan; Ma, Zhenqiang

doi:10.1504/ijnt.2014.059822

Cited by 1 publication

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“…Various nanomaterials such as nanotubes, nanowires, and two-dimensional (2D) materials have been actively explored for this purpose, because nanomaterials can be chemically synthesized easily on a large scale and exhibit exceptional electrical and optical properties [5, 9, 12-17, 18, 19]. In particular, nanoscale dimension of materials offers great mechanical bendability, which enables the production of flexible and wearable devices with specific functions [1,2,6,9,15,17,[20][21][22][23][24][25][26][27][28][29][30][31][32][33][34][35][36][37][38]. Diverse applications, such as wearable tactile sensors, bio-implantable devices and flexible display have been successfully demonstrated [10,18,28,[39][40][41][42][43][44][45][46][47][48][49][50][51].…”

Section: Introductionmentioning

confidence: 99%

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Si nanomebranes: Material properties and applications

2021

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Silicon (Si) has widely been used as an essential material in the modern semiconductor industry. Recently, new attempts have been actively made to apply Si to a variety of fields such as flexible electronic devices and biosensors by manufacturing Si nanomembranes (NMs) having nanometer thickness. In particular, as the thickness of Si is reduced to a nanometer scale, its mechanical, electrical, and optical properties differ from that of its bulk form, which provides opportunities for the development of new conceptual devices. In this review, we present recent advances in Si NM technology that exhibit functional features different from the bulk materials. In addition, we discuss the opportunities and current challenges related to this field. KEYWORDSSi nanomebranes, flexible electronics, bio-integrated electronics, Si optoelectronics, strain engineering Fabrication of Si nanomenbranesSi being a traditional semiconductor, is widely available for scientific and manufacturing purpose, in the form of rigid and brittle wafers. To fabricate mechanically flexible and stretchable Si membranes having thickness of few nanometers is, however, quite a challenging task. Flexible and stretchable silicon nanomembranes are fabricated by using the following

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Section: Introductionmentioning

confidence: 99%

“…Finally, we summarize the present status of this research field and provide perceptions on future trends for work. conventional top-down or bottom-up methods [4,5,17,28,37,51,54,65,72]. Anisotropic etching, selective etching, back etch method, transfer printing and buckling are the top-down approaches that are usually used [1, 4-6, 9, 53].…”

Section: Introductionmentioning

confidence: 99%