Fabrication method of low-loss large single mode ridge Ti:LiNbO3 waveguides

Dobrusin, Vadim; Ruschin, S.; Shpisman, Larisa

doi:10.1016/j.optmat.2006.08.011

Cited by 10 publications

(5 citation statements)

References 13 publications

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“…The propagation losses and the group index have been estimated for different widths of the 35 µm deep ridge waveguides. The results are presented in figure 6: they show that contrary to what happens in non vertical ridges [9,15], the propagation losses and the group index are pretty much the same for both polarizations. We can also observe that the losses tend to increase when the width of the ridge is reduced, which is not surprising since thin waveguides are more sensitive to imperfections of the walls or to the remaining dusts.…”

Section: Optical Characterizationmentioning

confidence: 87%

“…Wet etching techniques associated with ion implantation, proton exchange or domain inversion, have also been widely studied [12][13][14]. If the wet etching process is prepared with an annealing step, and followed by a subsequent step of Ti-indiffusion, the method shows to be very efficient for the fabrication of ultra-smooth ridges with a roughness of 20nm and propagation losses as low as 0.05dB/cm [15,16]. But such processes can only be applied on the -z face of LiNbO 3 substrates.…”

Section: Introductionmentioning

confidence: 99%

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High aspect ratio lithium niobate ridge waveguides fabricated by optical grade dicing

Courjal¹,

Guichardaz²,

Ulliac³

et al. 2011

J. Phys. D: Appl. Phys.

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We report the development of a quick process for fabricating lithium niobate ridge waveguides with smooth walls, aspect ratios larger than 500 and side wall verticality of 88°. The method is based on optical grade dicing, and allows the fabrication of ridges with a top width of 1µm and a depth of more than 500µm. Smart-cut ridge waveguides and strongly confined proton exchanged ridge waveguides are demonstrated. We show that the method enables the fabrication of ridge waveguides with propagation losses as low as 0.5dB/cm. A new fabrication process is thus proposed for the fabrication of optical components with enhanced acousto-optic, electro-optic or nonlinear interactions. The high aspect ratios open opportunities toward the development of 3D photonic components in thin films of LiNbO 3 , and toward hybrid integration of LiNbO 3 components.

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Section: Optical Characterizationmentioning

confidence: 87%

Section: Introductionmentioning

confidence: 99%

High aspect ratio lithium niobate ridge waveguides fabricated by optical grade dicing

Courjal¹,

Guichardaz²,

Ulliac³

et al. 2011

J. Phys. D: Appl. Phys.

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“…However, the substantial modification of one or more diffusion parameters leads to production of waveguides with excellent guidance for both TM and TE polarizations. 8 …”

Section: Oe Lettersmentioning

confidence: 99%

“…The presented technology was further applied for fabrication of various single-polarization-mode devices based on channel and ridge 8 waveguide structures of various widths. All these devices exhibited predicted single TM guidance and lack of susceptibility to slight variations of fabrication conditions.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of integrated <inline-formula><math display="inline" overflow="scroll"><mrow><mi mathvariant="normal">Ti</mi><mo>:</mo><mi mathvariant="normal">Li</mi><mi mathvariant="normal">Nb</mi><msub><mi mathvariant="normal">O</mi><mn>3</mn></msub></mrow></math></inline-formula> waveguide polarizer

Dobrusin

Ruschin

2008

Opt. Eng

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Abstract. The design and fabrication of an integrated waveguide polarizer in z-cut LiNbO 3 crystals are reported. Singlepolarization guiding is achieved by careful selection of Ti diffusion parameters exploiting the transverse electric/ transverse magnetic ͑TE/TM͒ refractive index anisotropy. Fabricated Ti: LiNbO 3 waveguide polarizers of 1.5 cm length exhibit less than 0.2-dB/ cm propagation loss at TM and 33-dB extinction ratio as measured at 1.55-m wavelength.

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“…However, the method is time-consuming and hence does not apply to the fabrication of rods or ridges. As an alternative, batch methods based on wet etching have been studied: many works have shown the capability of HF acids for etching LiNbO 3 substrates [3][4][5]. Traditionally, these methods lead to rough etched surfaces, but recent developments have shown that it is possible to smooth wet-etched surfaces by a subsequent annealing at high temperatures ($1020°C).…”

Section: Introductionmentioning

confidence: 99%

Ultra-smooth LiNbO3 micro and nano structures for photonic applications

Ulliac

Guichardaz

Rauch

et al. 2011

Microelectronic Engineering

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International audienceWe report on two approaches to achieve ultra-smooth structures on lithium niobate (LiNbO3) substrates. The first method relies on ICP-RIE (inductively coupled-reactive ionic etching) or on RIE, and is exploited here for the fabrication of rods with smooth etched surfaces. A series of tests have been performed with fluorine gases. Nanometric rods with 200, 400 or 600 nm diameters, with a periodicity of 400, 800 and 1200 nm respectively and etched angles close to 68 for the RIE process and 75 for the ICP-RIE process have been fabricated. The second process is based on ''optical grade dicing'' and is dedicated to the fabrication of deep-etched ridge waveguides. First optical characterization results are reported. They show optical propagation losses value close to 0.1 dB/cm

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Fabrication method of low-loss large single mode ridge Ti:LiNbO3 waveguides

Cited by 10 publications

References 13 publications

High aspect ratio lithium niobate ridge waveguides fabricated by optical grade dicing

High aspect ratio lithium niobate ridge waveguides fabricated by optical grade dicing

Fabrication of integrated <inline-formula><math display="inline" overflow="scroll"><mrow><mi mathvariant="normal">Ti</mi><mo>:</mo><mi mathvariant="normal">Li</mi><mi mathvariant="normal">Nb</mi><msub><mi mathvariant="normal">O</mi><mn>3</mn></msub></mrow></math></inline-formula> waveguide polarizer

Ultra-smooth LiNbO3 micro and nano structures for photonic applications

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