International Conference onIndium Phosphide and Related Materials, 2003.
DOI: 10.1109/iciprm.2003.1205313
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Fabrication of 0.1μm-gate InP HEMTs using i-line lithography

Ken Sawada
1
,
Kozo Makiyama
2
,
Tsuyoshi Takahashi
3
et al.
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