Fabrication of 1D and 2D structures at submicrometer scale on lithium niobate by electron beam bombardment

Restoin, Christine; Massy, Sandrine; Darraud-Taupiac, C.; Barthélémy, Alain

doi:10.1016/s0925-3467(02)00244-6

Cited by 54 publications

(29 citation statements)

References 17 publications

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“…Moreover, its high electro-optic coefficient and its low optical losses make this material very adequate for optical communication systems. Therefore, the perspective of fabricating miniature electro-optical and all-optical LN devices is attracting the research on LiN bO 3 nanostructuring [4,5]. However, the obtention of good nanometric optical structures in LiN bO 3 continues to be a difficult task due to its wellknown resistivity towards standard machining techniques like wet etching [6].…”

Section: Introductionmentioning

confidence: 99%

Nanostructuring lithium niobate substrates by focused ion beam milling

et al. 2005

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We report on two novel ways for patterning Lithium Niobate (LN) at submicronic scale by means of focused ion beam (FIB) bombardment. The first method consists of direct FIB milling on LiN bO3 and the second one is a combination of FIB milling on a deposited metallic layer and subsequent RIE (Reactive Ion Etching) etching. FIB images show in both cases homogeneous structures with well reproduced periodicity. These methods open the way to the fabrication of photonic crystals on LiN bO3 substrates.

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Section: Introductionmentioning

confidence: 99%

Nanostructuring lithium niobate substrates by focused ion beam milling

et al. 2005

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“…Double ionic implantation is important in order to enlarge the created optical barrier which in turn reduces the optical losses by tunneling in implanted waveguides. The second step was devoted to the fabrication of a PBG structure by EB bombardment combined with a selective chemical etching HF : HNO 3 (1:2) as reported in reference (Restoin et al 2003). The EB was produced using a SEM Philips XL 20, associated with a lithography application (Elphy Quantum by Raith), delivering a pulsated mode with the irradiation parameters reported in Table 1.…”

Section: Methodsmentioning

confidence: 99%

“…It is faster on the faces −z and −y than on +z and +y (face x does not have any difference due to symmetry). However, Restoin et al (2003) showed that both the experimental process and the EB parameters strongly influence the pattern and the geometry of the obtained structure. Moreover, they indicated that the geometry and the nature of pattern are a result of a compromise between various parameters including the probe current, the irradiation time and the thickness of the metallic film used for double-metallization of the sample.…”

Section: Methodsmentioning

confidence: 99%

“…The fabrication of 2D structures at a sub-micrometer scale in LiNbO 3 has been recently reported by using electron beam (EB) irradiation technique obtained from Scanning Electron Microscope (SEM) (Restoin et al 2003), focused ion beam (FIB) milling (Lacour et al 2005) and femtosecond laser processing (Devesh Deshpande et al 2005). Besides, several fabrication techniques have been developed to achieve waveguide structures in LiNbO 3 , such as diffusion, ion exchange and ionic implantation.…”

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confidence: 99%

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Photonic band gap grating in He+-implanted lithium niobate waveguides

et al. 2007

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In this work, we report the investigation of 2D photonic crystals in lithium niobate associated with waveguiding structures fabricated by He + implantation. From the material point of view, the investigation of PBG structures in lithium niobate is of great interest for optoelectronics technology since this crystal is one of the most important materials widely used in integrated and non linear optics. The choice of the implantation technique to produce the waveguide is motivated by the possibility of having both Transverse Electric (TE) and Transverse Magnetic (TM) guided modes in order to obtain a total photonic band gap (PBG).

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“…In our experiment, AFM (NanoScope IIIa Scanning Probe Microscope, Digital Instruments) is used to observe the domain patterns for confirmation. 23 which demonstrated a 2-D domain-inverted structure in a thin layer beneath the negative c-face. In our experiment, the designed pattern seems to induce domain-inversion with a square lattice.…”

Section: Fabrication Of Ferroelectric Domain Gratingmentioning

confidence: 99%

Two-dimensional structures of ferroelectric domain inversion in LiNbO3 by direct electron beam lithography

Tang

Qin

et al. 2003

Journal of Applied Physics

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We report on the fabrication of domain-reversed structures in LiNbO 3 by means of direct electron beam lithography at room temperature without any static bias. The LiNbO 3 crystals were chemically etched after the exposure of electron beam and then, the patterns of domain inversion were characterized by atomic force microscopy (AFM). In our experiment, an interesting phenomenon occurred when the electron beam wrote a one-dimensional (1-D) grating on the negative c-face: a two-dimensional (2-D) dotted array was observed on the positive c-face, which is significant for its potential to produce 2-D and three-dimensional photonic crystals. Furthermore, we also obtained 2-D ferroelectric domain inversion in the whole LiNbO 3 crystal by writing the 2-D square pattern on the negative c-face. Such a structure may be utilized to fabricate 2-D nonlinear photonic crystal. AFM demonstrates that a 2-D domain-reversed structure has been achieved not only on the negative c-face of the crystal, but also across the whole thickness of the crystal.

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Fabrication of 1D and 2D structures at submicrometer scale on lithium niobate by electron beam bombardment

Cited by 54 publications

References 17 publications

Nanostructuring lithium niobate substrates by focused ion beam milling

Nanostructuring lithium niobate substrates by focused ion beam milling

Photonic band gap grating in He+-implanted lithium niobate waveguides

Two-dimensional structures of ferroelectric domain inversion in LiNbO3 by direct electron beam lithography

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