Fabrication of 4H–SiC microvias using a femtosecond laser assisted by a protective layer

Liu, Bin; Fan, Panpan; Song, Hongwei; Liao, Kai-Hsiu; Wang, Wenjun

doi:10.1016/j.optmat.2021.111695

Cited by 8 publications

(3 citation statements)

References 23 publications

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“…By choosing the appropriate laser fluence and scanning speed, it is possible to process 3D microchannels with submicron diameters directly inside transparent hard materials. [ 40 ]…”

Section: Basic Principle and Methodsmentioning

confidence: 99%

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Femtosecond Laser Fabrication of Microchannels in Transparent Hard Materials

Wang

et al. 2023

Adv Materials Technologies

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The excellent characteristics of transparent hard materials such as high hardness, high transparency, corrosion resistance, and high temperature resistance enable their applications in microfluidic substrates even in harsh environments. Microchannels are important parts in microfluidic systems, and the preparation of microchannel structures in transparent hard materials deserves further in‐depth study. The traditional processing method is contact processing with large thermal influence and low processing efficiency, so it is impossible to obtain complex microchannels with high quality and high aspect ratio. The femtosecond laser processing is a non‐contact processing approach with no thermal damage, high processing accuracy, and easy to form complex microchannels, making it the best choice for processing microchannels in transparent hard materials. This work reviews the recent advances in femtosecond laser processing of transparent hard materials to form microchannel structures, focusing on the reaction mechanism, processing methods, and the obtained microchannel structures, including surface microchannels, 2D microchannels, and 3D microchannels. Furthermore, the application of microchannel structure in microfluidic field, including optical inspection and biochemical reaction, is also described.

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“…By choosing the appropriate laser fluence and scanning speed, it is possible to process 3D microchannels with submicron diameters directly inside transparent hard materials. [ 40 ]…”

Section: Basic Principle and Methodsmentioning

confidence: 99%

mentioning

confidence: 99%

Femtosecond Laser Fabrication of Microchannels in Transparent Hard Materials

Wang

et al. 2023

Adv Materials Technologies

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“…The λ/4-wave plate was used to convert linearly polarized light into circularly polarized light. In order to filter out stray light around the laser beam, an aperture was used [103]. The equipment diagram for underwater processing is shown in Figure 10.…”

Section: Underwater Laser Composite Processing Technologymentioning

confidence: 99%

A Review of Femtosecond Laser Processing of Silicon Carbide

Wang,

Zhang,

Chen

et al. 2024

Micromachines

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Silicon carbide (SiC) is a promising semiconductor material as well as a challenging material to machine, owing to its unique characteristics including high hardness, superior thermal conductivity, and chemical inertness. The ultrafast nature of femtosecond lasers enables precise and controlled material removal and modification, making them ideal for SiC processing. In this review, we aim to provide an overview of the process properties, progress, and applications by discussing the various methodologies involved in femtosecond laser processing of SiC. These methodologies encompass direct processing, composite processing, modification of the processing environment, beam shaping, etc. In addition, we have explored the myriad applications that arise from applying femtosecond laser processing to SiC. Furthermore, we highlight recent advancements, challenges, and future prospects in the field. This review provides as an important direction for exploring the progress of femtosecond laser micro/nano processing, in order to discuss the diversity of processes used for manufacturing SiC devices.

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Graphene oxide coated silicon carbide films under projectile impacts

Bidhendi

Behdinan

2024

International Journal of Mechanical Sciences

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Fabrication of 4H–SiC microvias using a femtosecond laser assisted by a protective layer

Cited by 8 publications

References 23 publications

Femtosecond Laser Fabrication of Microchannels in Transparent Hard Materials

Femtosecond Laser Fabrication of Microchannels in Transparent Hard Materials

A Review of Femtosecond Laser Processing of Silicon Carbide

Graphene oxide coated silicon carbide films under projectile impacts

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