Fabrication of a 100 × 100 mm² nanometer-thick graphite pellicle for extreme ultraviolet lithography by a peel-off and camphor-supported transfer approach

Abstract

An Extreme ultraviolet (EUV) lithography pellicle is used to physically protect a mask from the contaminants during EUV exposure process and needs to have a high EUV transmittance. The EUV...

Graphite Pellicle: Physical Shield for Next‐Generation EUV Lithography Technology

“…Reproduced with permission. [ 25 ] Copyright 2022, The Authors, published by the Royal Society of Chemistry. b) Bulge test tool of NGF pellicle.…”

“…[ 24 ] Subsequently, we recently developed an NGF pellicle of 100 mm × 100 mm, which is realized by the successful NGF growth on Ni film/ SiO 2 /Si substrate (135 mm × 135 mm) and camphor transfer method. [ 25 ] For the scalability, a 1.5 µm thick Ni film was sputtered on an 8‐in. SiO 2 /Si wafer, then NGF was synthesized using a homemade cold‐wall CVD system (Figure 5c).…”

“…We investigated the conditions of camphor deposition/ removal and optimized for large-scale pellicle fabrication either in wet or dry transfer processes and compared them to those with the PMMA transfer process. [24,25] In contrast to the traditional practice of using a PMMA supporting layer, camphor sublimates at room temperature, thus it does not leave any residues on the NGF. Compared to other supporting layer materials including SPPOI, [31] rosin, [32] pentacene, [33] and PMMA, [34] camphor has the lowest adsorption energy of 0.09 eV to graphene, which is the reason for the selection of camphor.…”

“…Copyright 2021, IOP Publishing Ltd. c) NGF growth on Ni film (135 mm × 135 mm). Reproduced with permission [25]. Copyright 2022, The Authors, published by the Royal Society of Chemistry.…”

A Review of Acoustic Devices Based on Suspended 2D Materials and Their Composites

“…The success rate of the transfer using this sublimation-assisted transfer process is close to 100%, achieving suspended graphene with a thickness of 10 layers and a diameter of 4 mm, which is at least two orders of magnitude larger than previous literature. [74] What is even more astonishing is that Nam et al utilized camphor as a support layer and gradually sublimated it using ethanol vapor at 75 °C, achieving a ultralarge suspension of graphene with amazingly thickness of ≈20 nm and diameter of 100 × 100 mm 2 after 48 h. [75] These suspended graphene membranes with ultrahigh diameter to thickness ratios are crucial for the fabrication of high-performance acoustic devices.…”