Fabrication of a high-temperature microreactor with integrated heater and sensor patterns on an ultrathin silicon membrane

Tiggelaar, Roald M.; Male, P. van; Berenschot, J.W.; Gardeniers, Han; Oosterbroek, R.E.; Croon, M.H.J.M. de; Schouten, J.C.; Berg, Albert van den; Elwenspoek, Michael Curt

doi:10.1016/j.sna.2004.09.004

Cited by 69 publications

(48 citation statements)

References 29 publications

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“…One special benefit of silicon is the ability to fabricate thin membranes, which reduce thermal mass and enable high temperature ramp-rates. 27 Meanwhile, the mechanical properties of silicon have been exploited to fabricate pumps 28 and valves, 29 and in making complex 3D structures, for example nebulizer chips, 30 microreactors, 27 cell growth chambers, 31 and electrospray tips. 32 Glass has been used in applications ranging from capillary electrophoresis 33 to polymerase chain reactions (PCR) 34 and to gas chromatographs.…”

Section: The Remaining Advantages Of Silicon and Glassmentioning

confidence: 99%

“…One special benefit of silicon is the ability to fabricate thin membranes, which reduce thermal mass and enable high temperature ramp-rates. 27 Meanwhile, the mechanical properties of silicon have been exploited to fabricate pumps 28 Hybrid silicon-glass, silicon-polymer, or glass-polymer devices can be made, but the differences in material properties need to be understood. For example, in a comparison of capillary electrophoresis chips made of single materials vs. bonded dissimilar materials, the singlematerial devices performed better.…”

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confidence: 99%

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A practical guide for the fabrication of microfluidic devices using glass and silicon

Iliescu¹,

Taylor²,

Avram³

et al. 2012

Biomicrofluidics

310

207

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This paper describes the main protocols that are used for fabricating microfluidic devices from glass and silicon. Methods for micropatterning glass and silicon are surveyed, and their limitations are discussed. Bonding methods that can be used for joining these materials are summarized and key process parameters are indicated. The paper also outlines techniques for forming electrical connections between microfluidic devices and external circuits. A framework is proposed for the synthesis of a complete glass/silicon device fabrication flow. I. WHY USE SILICON AND GLASS IN MICRO-AND NANO-FLUIDIC APPLICATIONS?Micro-and nano-fluidic technology continues to be embraced by biologists, 1-3 chemists, 4 and engineers throughout academia and industry. As its applications have expanded, there has been an explosion in the range of materials and processes used to fabricate these devices. The earliest microfluidic devices (e.g., gas 5 and liquid 6 chromatography devices) were made from silicon and glass and borrowed processes directly from semiconductor and microelectromechanical systems (MEMS) manufacturing. 7 Now, however, many researchers have moved away from silicon and glass, and instead use cast elastomers such as polydimethylsiloxane (PDMS)-which is ideal for swift prototyping-or thermoplastic polymers, which can be hot-embossed or injection-molded and are well suited to inexpensive manufacturing. Yet, there remain many applications where glass and silicon offer advantages over polymeric materials. In this paper, we highlight these advantages and offer a framework for selecting fabrication processes when using silicon and glass. A. The dominance of soft lithographyOver the last decade, PDMS has become virtually the default material for forming microfluidic devices, 8 because of the sheer ease with which it can be cast on to a micro-scale mould and then strongly bonded to glass. 9 The elastomeric nature of the material has been exploited to integrate fluidic valves and pumps on-chip and has simplified the production of multi-layer devices because the soft layers readily conform to each other. 10,11 Yet, the low stiffness (usually <1 MPa) of PDMS relative to amorphous thermoplastics, silicon, and glass has its own a) Authors to whom correspondence should be addressed. Electronic addresses: ciliescu@ibn.a-star.edu.sg and hkt@ntu.edu.sg. 6, 016505 (2012) drawbacks. High aspect-ratio channels are notoriously difficult to fabricate in PDMS because of their propensity to collapse. 12 Moreover, difficulties in automating the handling of such a soft material have hampered efforts to scale up PDMS device manufacturing. Meanwhile, PDMS's high oxygen and water permeabilities have proved both a blessing and a curse in different applications.The hydrophobic nature of PDMS can be an important consideration for some biological applications. In drug screening applications, for example, hydrophobic drugs as well as metabolites (urea or albumin) can be absorbed into the device's material due to hydrophobic--hydrophobic interaction...

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Section: The Remaining Advantages Of Silicon and Glassmentioning

confidence: 99%

“…One special benefit of silicon is the ability to fabricate thin membranes, which reduce thermal mass and enable high temperature ramp-rates. 27 Meanwhile, the mechanical properties of silicon have been exploited to fabricate pumps 28 Hybrid silicon-glass, silicon-polymer, or glass-polymer devices can be made, but the differences in material properties need to be understood. For example, in a comparison of capillary electrophoresis chips made of single materials vs. bonded dissimilar materials, the singlematerial devices performed better.…”

mentioning

confidence: 99%

A practical guide for the fabrication of microfluidic devices using glass and silicon

Iliescu¹,

Taylor²,

Avram³

et al. 2012

Biomicrofluidics

310

207

View full text Add to dashboard Cite

show abstract

“…Miniaturized systems applied as high temperature microreactors are usually implemented using independent modules, where different technological platforms such as microfluidics, thermal modules, detection systems and electronics are integrated. Most of these systems consist on glass, silicon or plastic microfluidic platforms immerged in external oil-baths [28][29] or placed over hot plates at high temperatures [30][31]. These modular approaches provide certain advantages that include easy exchangeability/replacement of the platforms in case of malfunction, versatility in case of changing experimental needs and simple design and fabrication.…”

Section: Introductionmentioning

confidence: 99%

“…This may respond to the complexity associated to conventional methodologies used for their fabrication. Tiggelaar et al proposed a high temperature microreactor that included an integrated sensor/actuator system based on the microelectronics technology [30]. The high integration level offered by this microreactor is remarkable but the fabrication process involves high costs, highly skilled staff, special conditions (clean room) and lasting procedures.…”

Section: Introductionmentioning

confidence: 99%

Design, fabrication and characterization of microreactors for high temperature syntheses

Martínez-Cisneros

Pedro

Puyol

et al. 2012

Chemical Engineering Journal

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Microfluidic reactors offer many potential advantages in several research and industrial fields such as processes intensification, which includes a better reaction control (kinetics and thermodynamics), a high throughput and a safer operational environment (reduced manipulation of dangerous reagents and low sub-products generation). Nevertheless, scaling-down limitations appear concerning the materials used in the fabrication of microreactors for most of the liquid-phase reactions, since they usually require high temperatures (up to 300ºC), solvents and organic reagents. In this work, the development of a set of modular and monolithic microreactors based on the integration of microfluidics and a thermal platform (sensor/high-temperature heater) is proposed to perform high temperature reactions. The reliability and performance of both configurations were evaluated through an exhaustive characterization process regarding their thermal and microfluidic performance. Obtained results make the devices viable for their application in controlled and reproducible synthetic processes occurring at high temperatures such as the synthesis of quantum dots. The proposed microfluidic approach emerge as an engaging tool for processes intensification, since it provides better mass and temperature transfer than conventional methods with a reduction not only of the size and energy consumption, but also of by-products and reagents consumption.

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“…For this reason, they are often used for gas sensors [1,2], membrane-type microreactors [3][4][5][6][7][8][9], materials characterization [6][7][8], and infrared emitters [1,10]. A microhotplate generally consists of a thin film heater coil, wire, or meander which is suspended within a silicon rim for thermal isolation.…”

Section: Introductionmentioning

confidence: 99%

Microhotplates with TiN heaters

Creemer

Briand

Zandbergen

et al. 2008

Sensors and Actuators A: Physical

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a b s t r a c tTitanium nitride (TiN) has been investigated as a heater material for microhotplates and microreactors. TiN is available in many CMOS processes, unlike many other microheater materials. In addition, TiN has a very high melting point (2950 • C) meaning that it is stable up to higher temperatures than platinum (Pt) and polysilicon. For the first time, TiN is tested inside a conventional membrane of LPCVD silicon nitride (SiN). Two types of sputtered TiN are considered: high stress and low stress. Their performance is compared with that of e-beam evaporated Pt. The maximum average temperature of TiN heaters is 11% higher than those of Pt, and reaches over 700 • C. Failure of the TiN heaters is due to rupture of the membrane. Failure of the Pt heater is due to electro-stress migration. For high-stress TiN, the temperature coefficient of resistance is almost constant and close to that of Pt, making the material very suitable for temperature sensing. In the case of low-stress TiN the temperature coefficient of resistance (TCR) becomes nonlinear and changes sign. The large differences between the materials are explained by the grain structure. The different grain structures are related to the sputtering parameters according to the Thornton model.

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Fabrication of a high-temperature microreactor with integrated heater and sensor patterns on an ultrathin silicon membrane

Cited by 69 publications

References 29 publications

A practical guide for the fabrication of microfluidic devices using glass and silicon

A practical guide for the fabrication of microfluidic devices using glass and silicon

Design, fabrication and characterization of microreactors for high temperature syntheses

Microhotplates with TiN heaters

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