Fabrication of a metal protector for a fiber sensor using through-mask electrochemical micromachining with pulse DC power

Shih, Wei-Hung; Wang, Chih-To; Tsai, Hsun-Heng; Wu, Wenqi

doi:10.1007/s00542-011-1225-y

Cited by 5 publications

(3 citation statements)

References 14 publications

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“…5,58,59,80,91,112,113,127,128,146 Non-noble metals encompass hafnium, 91 molybdenum 5 and zirconium. 91 In addition, iron-nickel, 33,147 nickel 91 and titanium alloys, 62,145,[148][149][150] as well as a range of austenitic and martensitic stainless steels 5,6,43,44,58,59,108,[112][113][114]129,137,[142][143][144][151][152][153][154][155] are machinable. The frequent application of saline electrolytes is based on their non-toxicity, low cost, and long-term stability.…”

Section: Metals and Electrolytesmentioning

confidence: 99%

Review—Through-Mask Electrochemical Micromachining

Baldhoff

Nock

Marshall

2018

J. Electrochem. Soc.

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Through-mask electrochemical micromachining (TMEMM) is a versatile microfabrication technique, which combines anodic metalshaping and -finishing steps in a single operation for the purpose of microstructuring a wide range of electrically conductive materials. It has been extensively utilized for the manufacture of precision-engineered components in microsystems, such as microlenses, microprobes, microactuators, microchannels and microvalves. This is because TMEMM is able to mass-produce parts; it is applicable to difficult-to-etch materials and operable under polishing conditions. This review provides an in-depth summary of the current state of TMEMM and presents key concepts relevant to its application. To this end, the interplay between the current distribution, mass-transfer effects and surface-film formation is discussed, and its effect on the machining rate, shape profile and surface finish is highlighted. Also, past incarnations of TMEMM are reviewed in terms of their masking method, substrate material, electrolyte composition and technical application. Techno-economic aspects of TMEMM are debated in relation to potential rival techniques, taking microreactor fabrication as an example for a novel area of application. This is followed by an overview of process variations and recent developments.

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Section: Metals and Electrolytesmentioning

confidence: 99%

Review—Through-Mask Electrochemical Micromachining

Baldhoff

Nock

Marshall

2018

J. Electrochem. Soc.

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“…Wu et al fabricated a stainless steel protector for a weak fiber sensor by TMECM [14]. Qu et al proposed using a dry-film photoresist as a mask to fabricate microdimple arrays by TMECM and successfully produced microdimple arrays with 94 m in diameter and 22.7 m deep on cylindrical inner surfaces [15].…”

Section: Advances In Mechanical Engineeringmentioning

confidence: 99%

“…Through-mask electrochemical machining (TMECM) is a very important technology in the processing holes matrix of difficult-to-cut metal materials [13]. Wu et al fabricated a stainless steel protector for a weak fiber sensor by TMECM [14]. Qu et al proposed using a dry-film photoresist as a mask to fabricate microdimple arrays by TMECM and successfully produced microdimple arrays with 94 m in diameter and 22.7 m deep on cylindrical inner surfaces [15].…”

Section: Introductionmentioning

confidence: 99%

Distribution Manner of Compaction Circular Cylinders in Through-Active-Mask Electrochemical Machining

Wang

Zheng

et al. 2014

Advances in Mechanical Engineering

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Electrochemical machining is widely used in the processing of difficult-to-machine metal materials. And through-mask electrochemical machining is a very important technology in the processing array structure of difficult-to-cut metal materials. Traditional through-mask electrochemical machining always uses a photoresist as the mask. The production process of a mask is complicated, and the mask cannot be reused. In this paper, through-active-mask electrochemical machining to process array structure in difficult-to-machine metal materials was investigated. Compared with traditional electrochemical machining masks, a copper-clad laminate is used to make the mask by mechanical machining in through-active-mask electrochemical machining. Also, the mask does not stick together with the workpiece but covers the workpiece by mechanical compaction, so the mask can be reused. In order to ensure the mask is in close contact with the workpiece, we need to arrange many compaction circular cylinders within the flow channel. The influences on electrolyte flow of compaction circular cylinders were investigated. The distribution of the compaction circular cylinders affects the electrolyte flow state, thereby affecting the processing. By analyzing the electrolyte flow state for the different distributions of compaction circular cylinders, one can find the best distribution of compaction circular cylinders for the required processing.

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Effect of various masked patterned tools during micro-electrochemical texturing

Kunar

Bhattacharyya

2018

Microsyst Technol

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Fabrication of a metal protector for a fiber sensor using through-mask electrochemical micromachining with pulse DC power

Cited by 5 publications

References 14 publications

Review—Through-Mask Electrochemical Micromachining

Review—Through-Mask Electrochemical Micromachining

Distribution Manner of Compaction Circular Cylinders in Through-Active-Mask Electrochemical Machining

Effect of various masked patterned tools during micro-electrochemical texturing

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