2015
DOI: 10.1088/0960-1317/25/2/027001
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Fabrication of a micro-hole array on metal foil by nanosecond pulsed laser beam machining using a cover plate

Abstract: A novel laser beam machining (LBM) method is proposed to achieve higher precision and better quality beyond the limits of a commercialized nanosecond pulsed laser system. The use of a cover plate is found to be effective for the precision machining of a thin metal foil at micro scale. For verifying the capability of cover plate laser beam machining (c-LBM) technology, a 30 by 30 array of micro-holes was fabricated on 8 µm-thick stainless steel 304 (STS) foil. As a result, thermal deformation and cracks were si… Show more

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Cited by 15 publications
(4 citation statements)
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“…With the development of high-precision technology, more and more high-strength, high-hardness, and hightemperature materials are needed. A number of material removal processes such as electrical discharge machining (EDM), [1][2][3] electrical ultrasonic machining (USM), 4,5 electrochemical machining (ECM), 6,7 and laser beam machining (LBM) [8][9][10] are developed for better ways of machining complex shapes in these highstrength materials.…”
Section: Introductionmentioning
confidence: 99%
“…With the development of high-precision technology, more and more high-strength, high-hardness, and hightemperature materials are needed. A number of material removal processes such as electrical discharge machining (EDM), [1][2][3] electrical ultrasonic machining (USM), 4,5 electrochemical machining (ECM), 6,7 and laser beam machining (LBM) [8][9][10] are developed for better ways of machining complex shapes in these highstrength materials.…”
Section: Introductionmentioning
confidence: 99%
“…In this study, 40 μm-thick copper is used as a filter material and more than 10 W of laser beam power is used because copper is not ablated at lower powers, because of its high light reflectivity and thermal conductivity. During laser beam drilling, the outer part of the machining area of copper is held down by another plate to reduce thermal deformation [15].…”
Section: Laser Beam Machiningmentioning
confidence: 99%
“…Recently, nanosecond fiber lasers have been used in many micromachining related applications like engraving, microcutting, microdrilling, surface structuring on variety of surfaces including metals, polymers, and composites. [20][21][22][23][24][25][26] Although, nanosecond fiber lasers remove the material following a thermal cycle that is heating, melting and evaporation, their low cost and low maintenance makes them a lucrative choice for micromachining related applications. Fiber lasers are cost effective, low maintenance, and easy to use systems which makes it favorable for surface structuring of metals.…”
Section: Introductionmentioning
confidence: 99%