Fabrication of a micromachined direct methanol fuel cell

Stanley, Kevin G.; Wu, Qixing; Vanderhoek, Tom P K; Nikumb, Suwas; Walker, Z.M.; Parameswaran, M.

doi:10.1109/ccece.2002.1015267

Cited by 6 publications

(4 citation statements)

References 4 publications

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“…Laser ablation has also seen minor adoption in MFC microfabrication [8][9][10][11][12][13][14][15]. This includes chip dicing [8], flowfield ablation [9,10], inlet hole drilling in steel, silicon and nickel [11][12][13], patterning of a hard mask for a subsequent reactive ion etching (RIE) step [14] and membrane-electrode assembly (MEA) segmentation [15]. 5 Author to whom any correspondence should be addressed.…”

Section: Introductionmentioning

confidence: 99%

“…Advantages of laser ablation include rapid prototyping, maskless multi-level material removal, and non-contact operation. Laser ablation has seen minor adoption in MFC microfabrication [8][9][10][11][12][13][14][15]. This includes: chip dicing [8]; flowfield ablation [9,10]; inlet hole drilling in steel, silicon and nickel [11][12][13]; patterning of a hard mask for a subsequent reactive ion etching (RIE) step [14]; and membrane-electrode assembly (MEA) segmentation [15].…”

Section: Introductionmentioning

confidence: 99%

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Picosecond laser ablation for silicon micro fuel cell fabrication

Scotti¹,

Trusheim²,

Kanninen³

et al. 2013

J. Micromech. Microeng.

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Abstract:We have investigated laser ablation as a microfabrication approach to produce micro fuel cells (MFCs) in silicon. Picosecond pulses (15 ps) at a wavelength of 355 nm are used to make all of the MFC structures. To assess the benefits and drawbacks of laser ablation, reference cells have been produced by deep reactive ion etching (DRIE) using matching geometries. Ablated and etched cells have been evaluated and compared side by side. Our conclusion is that picosecond laser ablation is very well suited for MFC fabrication. The ablated cells match or excel DRIE-microfabricated cells in terms of current and power densities. Ablated MFCs achieved 47.6 mW cm -2 of power density and 121 mA cm -2 current density.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Picosecond laser ablation for silicon micro fuel cell fabrication

Scotti¹,

Trusheim²,

Kanninen³

et al. 2013

J. Micromech. Microeng.

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“…Some challenges remain as fuel cells are miniaturized, e.g., inconvenient sealing and complicated assembly operation. The methods published to assemble µDMFC include fixtures with locating structures [3][4][5][6], epoxy resin [7], hot pressing [8] and polydimethylsiloxane (PDMS) [9]. Fixtures with locating structures need high-accuracy machining, which costs high and weakens the advantages of MEMS technologies.…”

Section: Introductionmentioning

confidence: 99%

A Novel Assembly Method for a Micro Direct Methanol Fuel Cell Using Multi-Layer Bonding Technique

Zhu

Wang

Zhou

2011

KEM

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A novel assembly method for a micro direct methanol fuel cell (μDMFC) using multi-layer bonding is developed. The anode and cathode plates of the μDMFC are fabricated by using MEMS technologies. PDMS gaskets are introduced to fill the gap between the silicon plate and the membrane electrode assembly (MEA) to prevent fuel or oxidant leaking. To assemble a μDMFC, adhesive tapes and oxygen plasma treatment of the PDMS gasket for surface activation are introduced. In this method, the PDMS gasket with adhesive tapes is bonded to the silicon plate then bonded to the MEA, which fixes the movable components of the μDMFC to simplify the assembly operation. The novel assembly method shows good maneuverability and reliability. The μDMFC shows great performance due to the low internal resistance attributing to this novel assembly method. With thermal insulated holders, the μDMFC generates a power density of 20.29mW/cm2. This assembly method is applicable for the assembly of the μDMFC stack.

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“…However, generators of this type require high-rotatinghoving-speed components that +e relatively more difficult to fabricate and operate at micro scale, in contrast to the approaches that do not require moving parts. These approaches include fuel cells [6], which are .not combustion-based, and combustion-based micro thermoelectric generators The table lists some typical emitter materials and their properties. TI power generation is based on electron emission from a hot emitter (cathode) by gaining thermal energy to overcome the work function barrier. The electrons cross a gap and reach a cold collector (anode) and an output current can be obtained if the emitter and collector are connected externally through a load (Fig.…”

Section: Introductionmentioning

confidence: 99%

Micro combustion-thermionic power generation: feasibility, design and initial results

Zhang

Najafi

Bernal

et al.

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (

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This paper reports for the first time the design, development and initial results from a micro power generator based on thermionic (TI) emission using combustion. Several major results are achieved. .Thinfilms of BaO are integrated with Si to form the emitter and collector of a TI converter. Field emission and TI emission currents are successfully measured from this converter. Thick S O 2 rings are formed to achieve excellent thermal isolation. An integrated process to fabricate micromachined TI power generators is developed. Combustion has been achieved in the micromachined combustor. And power generation of ' -1 pW has been measured in emitter-collector subsystem testing. Improvement of the device and testing is needed for achieving system-level power generation from combustion.

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Fabrication of a micromachined direct methanol fuel cell

Cited by 6 publications

References 4 publications

Picosecond laser ablation for silicon micro fuel cell fabrication

Picosecond laser ablation for silicon micro fuel cell fabrication

A Novel Assembly Method for a Micro Direct Methanol Fuel Cell Using Multi-Layer Bonding Technique

Micro combustion-thermionic power generation: feasibility, design and initial results

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