2003
DOI: 10.1116/1.1596221
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Fabrication of a self-aligned microtip field emission array

Abstract: Articles you may be interested inField emission emitter array with a self-aligned volcano-type gate: Fabrication and characterization Field emission cathode array with self-aligned gate electrode fabricated by silicon micromachining Fabrication of self-aligned silicon field emission devices and effects of surface passivation on emission current

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Cited by 7 publications
(1 citation statement)
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“…[23] Using a excimer KrF laser at an energy density of 242 mJ/cm 2 crystallised strips of films 4 mm wide were produced. This crystallised area was then capped with a 150 nm thick a-SiN layer followed by a 25 nm layer of evaporated Cr as schematically shown in Fig.…”
Section: Nanosilicon Based Materials Cathodesmentioning
confidence: 99%
“…[23] Using a excimer KrF laser at an energy density of 242 mJ/cm 2 crystallised strips of films 4 mm wide were produced. This crystallised area was then capped with a 150 nm thick a-SiN layer followed by a 25 nm layer of evaporated Cr as schematically shown in Fig.…”
Section: Nanosilicon Based Materials Cathodesmentioning
confidence: 99%