Fabrication of aberration-corrected tunable micro-lenses

Mader, Daniel; Seifert, Andreas; Zappe, Hans

doi:10.1109/omems.2008.4607828

Cited by 7 publications

(4 citation statements)

References 5 publications

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“…Traditionally, lenses are processed by glasses, polycarbonate and plastic, so they have constant properties due to the inflexible shape. A variable focus lens is a novel development, such as liquid-filled lens, where a single lens cell controls its optical power by manipulating the curvature of the refractive surface [4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19][20][21] . The liquid inside plays a role as a transmit media and its properties, such as refractive index and abbe number, behaves as the lens parameters.…”

Section: Introductionmentioning

confidence: 99%

“…By doing so, two lenses could change their powers and corporately adjust with each other, so that the lens system could perform a tunable focal lengths with chromatic aberration corrected. Previous research have been done to address achromatic lens system with tunable liquid lens [19][20][21] . A multi-chamber liquid lens system was proposed, which utilizing multi-immiscible-liquid pairs or the thin elastic membranes to form a multi-chamber lens system.…”

Section: Introductionmentioning

confidence: 99%

“…The design procedure in reference 19 has given an overview of the theoretical foundation and shown an example of a 4 mm in diameter f/3.6 achromatic liquid lens. A prototype was built following this idea with all silicone membranes and 2 mm diameter aperture, and there are three chambers but only two chambers were filled with two different liquids and the third one was filled with air 20,21 . The test result proved the achromatic performance.…”

Section: Introductionmentioning

confidence: 99%

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An adaptive achromatic doublet design by double variable focus lenses

2014

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We proposed an adaptive achromatic doublet that composed by double variable focus lenses. Both variable focus lenses were the liquid-membrane-liquid structures, but they were filled with different liquid-pairs, so that they could perform low and high dispersion proprieties like the crown-flint doublet. The proposed doublet could perform a tunable focal length, and the chromatic aberration could be corrected at the same time. A comparison between an adaptive singlet and a doublet on the chromatic focal shift plots was conducted in Zemax, and the chromatic improvement was confirmed that the chromatic focal shift range was improved from 2.5% to 0.05%.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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An adaptive achromatic doublet design by double variable focus lenses

2014

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“…Another approach is the MOEMS liquid pneumatic lens. [5][6][7][8][9][10][11][12][13] In this type of element, pumping a liquid in and out of an optically transparent cavity with an elastic membrane changes the curvature in order to control focus. The liquid-filled lens requires a mechanical pumping system and may exhibit vibration sensitivity.…”

Section: Introductionmentioning

confidence: 99%

Improved micro-optoelectromechanical systems deformable mirror forin vivooptical microscopy

Moghimi

Wilson

Dickensheets

2012

J. Micro/Nanolith. MEMS MOEMS

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Micro-optoelectromechanical systems (MOEMS) deformable mirrors are being developed for focus control in miniature optical systems including endoscopic microscopes and small form-factor camera lenses. A new process is described to create membrane mirrors made from the photoset polymer SU-8. The SU-8 also serves as the adhesive layer for wafer bonding, resulting in a simple, low cost fabrication process. The process details and the optical properties of the resulting focus control mirrors, which have a diameter of 2 mm, a stroke in excess of 8 μm and very low residual aberration, are described. Multiple actuation electrodes allow active control of more than 1.4 μm peak-to-peak of wavefront spherical aberration. The MOEMS mirror is demonstrated in a confocal microscope in which it provides focus control during capture of in vivo images. © 2012 Society of Photo-Optical Instrumentation Engineers (SPIE).

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Self‐Contained Focus‐Tunable Lenses Based on Transparent and Conductive Gels

Liu

Qiu

2020

Macro Materials & Eng

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Focus‐tunable lenses have found wide applications in optical communications, medical diagnostics, and consumer electronics. However, many focus‐tunable lenses have complex architecture, slow response, and low focal length variation, due principally to the separate design of optical path and activation mechanism and the use of liquid medium. Herein, a new self‐contained focus‐tunable lenses based on transparent and conductive gels are developed. The plano‐convex gels, acting both as lens and electrodes of actuator, with desirable curvature are precisely patterned by inkjet 3D printing. When a voltage is applied to the gel lenses, the elastomer membrane is stretched radially by Maxwell force, resulting in a reduction of lens thickness that corresponds to an increase of curvature radius. Therefore, a large focal length variation of 32–81% and a fast response speed of 80–153 ms are obtained. It is believed that this self‐contained focus‐tunable gel lenses can find many applications in portable optical devices, particularly suitable for space‐constrained tasks.

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Fabrication of aberration-corrected tunable micro-lenses

Cited by 7 publications

References 5 publications

An adaptive achromatic doublet design by double variable focus lenses

An adaptive achromatic doublet design by double variable focus lenses

Improved micro-optoelectromechanical systems deformable mirror forin vivooptical microscopy

Self‐Contained Focus‐Tunable Lenses Based on Transparent and Conductive Gels

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