“…Multifunctional oxides are a broad family of materials exhibiting a series of special properties, such as ferroelectricity, piezoelectricity, dielectricity, superconductivity, and electrochemical activity. − Some of these oxides show strong coupling among lattice, charge, orbital, and spin order parameters, which provide a unique platform for studying a variety of cross-coupling effects including multiferroicity, metal-insulator transition (MIT), and colossal magnetoresistance (CMR). − Moreover, oxides in the form of thin films are of particular interest, because they often exhibit distinct material properties from the corresponding bulk crystals − due to the modified defect state, − lattice strain, , structural distortion, , surface area, , exotic polar topology, etc. Therefore, great efforts have been made to fabricate oxide thin films using advanced thin film synthesis techniques, including pulsed laser deposition (PLD), − atomic layer deposition (ALD), , chemical vapor deposition (CVD), , and molecular beam epitaxy (MBE). , Despite the successful fabrications of many oxide thin films, precisely controlling the thin film properties during the synthesis is still difficult due to the limited choice of substrates, difficulty to realize local control, and challenge to scale up.…”