2008
DOI: 10.1016/j.apsusc.2008.07.054
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Fabrication of As-doped p-type ZnO thin films using As2O3 as doping source material by E-beam evaporation

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Cited by 13 publications
(3 citation statements)
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“…8 For the development of ZnO-based devices, it is essential to fabricate high quality n-and p-type ZnO semiconductors. [14][15][16][17] At present, various techniques have been used to produce p-type ZnO, for example, pulse laser deposition (PLD), 18 molecular-beam epitaxy (MBE), 19 chemical vapor deposition (CVD), 20 sol-gel 21 and hydrothermal methods. In contrast, it remains a challenge to incorporate acceptor defects into ZnO to ensure stable p-type conduction properties.…”
Section: Introductionmentioning
confidence: 99%
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“…8 For the development of ZnO-based devices, it is essential to fabricate high quality n-and p-type ZnO semiconductors. [14][15][16][17] At present, various techniques have been used to produce p-type ZnO, for example, pulse laser deposition (PLD), 18 molecular-beam epitaxy (MBE), 19 chemical vapor deposition (CVD), 20 sol-gel 21 and hydrothermal methods. In contrast, it remains a challenge to incorporate acceptor defects into ZnO to ensure stable p-type conduction properties.…”
Section: Introductionmentioning
confidence: 99%
“…9,10 Several approaches using group-I and group-V elements as possible acceptor dopants have experimentally demonstrated the synthesis of p-type ZnO nanowires by ex situ or in situ doping processes, such as group-I elements (Li, Na and K) for Zn sites [11][12][13] or group-V elements (N, P, As and Sb) for oxygen sites. [14][15][16][17] At present, various techniques have been used to produce p-type ZnO, for example, pulse laser deposition (PLD), 18 molecular-beam epitaxy (MBE), 19 chemical vapor deposition (CVD), 20 sol-gel 21 and hydrothermal methods. 22,23 However, most of the above-mentioned methods can only prepare ZnO thin films or short nanowires, limiting the development of ZnO-based devices.…”
Section: Introductionmentioning
confidence: 99%
“…Nitrogen creates a relatively deep acceptor level of 0.165 eV, 8,9 has a low solubility limit, and has the tendency to self-compensate via the formation of donor-type complexes, such as N 2 on O sites and Zn i -N O . [10][11][12] Other group V elements, including P, 6,[13][14][15][16] As, [17][18][19][20] and Sb [21][22][23] have also been reported to lead to p-type ZnO.…”
Section: Introductionmentioning
confidence: 99%