“…The maximum pressure depends on the MBE geometry, the element to be oxidized, and the oxidant species used, but oxidant pressures less than about 10 À4 Torr are typically required for MBE. 76 While molecular oxygen has been used for the growth of oxides that are easily oxidized, 79,157,192,193,[196][197][198][199][200][201][202][203][204][205][210][211][212][213][214][215]217,[222][223][224][225][226][227][228]232,[235][236][237] oxidants with higher activity are needed for the growth of ferroelectrics containing species that are more difficult to oxidize, e.g., bismuth-, lead-, or copper-containing oxides. For this purpose, purified ozone [4][5][6][7]76,79,110,112,114,117,119,203,[206][207][208]…”