Fabrication of bio-microelectrodes for deep-brain stimulation using microfabrication and electroplating process

Abstract

This paper presents a novel bio-microelectrode structure for deep-brain stimulation in neural disorder treatment and a method for connecting PtIr 10 microwires onto this microelectrode. The microelectrode is consisted of four stimulation sites fabricated by microfabrication process and two recording sites formed by encapsulation technique. After Si-based microelectrode is fabricated through microfabrication process, electroplating is used to connect microwires to the microelectrode through a Pt film electroplated on the microwires that is fixed in the grooves of the microelectrode. Scanning electron microscopy revealed that the microwire was connected tightly to the microelectrode by electroplating, and the tensile strength of the microwire connection reached up to 0.375 MPa when the thickness of the Pt film was 3 lm and above. Cyclic voltammograms showed that the microelectrode and the electroplated connection had fine electrochemical stability. The results indicated that the electroplating could be used as an effective method for connecting PtIr 10 microwires with Pt film microelectrode in deep-brain stimulation.

Design, Fabrication, Simulation and Characterization of a Novel Dual-Sided Microelectrode Array for Deep Brain Recording and Stimulation

“…For the recoding site ( Figure 12 b), the cyclic voltammograms a typical showed a typical sigmoidal pattern due to the small area of the recording sites. The increase of peak currents was quite small with the increase of scan rates in Figure 12 b due to the small size and edge effect of the recording sites [ 62 ]. These results demonstrated that the fabricated microelectrode array possessed good electrochemical properties and stability.…”

Computational Fluid Dynamics Modelling of Microfluidic Channel for Dielectrophoretic BioMEMS Application

“…Hydraulic resistance is purely related to the drain channel length [3]. It can be evidenced by considering the flow of a fluid within the channel behave akin to the flow of electron in electric circuit (Figure 2(b)).…”

“…Based on Murray's Law, the cross section and shape of drain channel at n th level must be the same [ 31 ] in order to equalise the hydraulic resistance of each part and thereby generate a uniform flow distribution within the whole wide chamber. Hydraulic resistance is purely related to the drain channel length [ 3 ]. It can be evidenced by considering the flow of a fluid within the channel behave akin to the flow of electron in electric circuit ( Figure 2(b) ).…”

“…The device that integrated with this system is known as lab-on-a-chip and micrototal analysis system (TAS). Area of BioMEMS research and application included diagnostic, therapeutics, organ development [ 2 ], biomicroelectrode [ 3 ], tissue engineering [ 4 ], and bioinspired material for self-healing [ 5 ]. However, diagnostic application shows large researched segment presented in literature by many groups of study, where they are normally used to detect cells, proteins, microorganisms, viruses, and molecules of interest.…”

“…In a laboratory, many different techniques are used in order to examine and analyse specimens. Microfluidics is the one of the technology of systems which is used to study fluid transport process, in channels with dimension of tens to hundreds of micrometres [ 3 , 6 ]. The use of microfluidic channel has scaled down the fluidic processes to microscale with the advantage of smaller reagent volumes [ 7 ], shorter reaction times, and lower cost [ 8 ].…”