Fabrication of Bistable Prestressed Curved-Beam

Pane, Ivransa Zuhdi; Asano, Teita

doi:10.1109/imnc.2007.4456268

Cited by 5 publications

(5 citation statements)

References 1 publication

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“…2. 8) After cleaning, Si substrate was thermally oxidized to grow SiO 2 layer as the base material to form the curved beam. Following the photoresist coating and the beam patterning, the unnecessary SiO 2 was removed by wet etching.…”

Section: Fabricationmentioning

confidence: 99%

“…From the previous studies, it was known that the snap action in the bistable curved beam involves a conversion of the actuation energy to the bending and compression energies of the beam. [1][2][3][4][5][6][7][8] By suppressing the bending energy development, more portions of the actuation energy can be converted to the compression energy and the snap action is enabled to occur at lower actuation force. This can be realized by distributing the actuation force higher around the center and lower toward both ends of the curved beam in a symmetrical manner.…”

Section: Introductionmentioning

confidence: 99%

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Analysis and Fabrication of Ampere-Force Actuated Bistable Curved Beam

Pane

Asano

2009

jjap

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An actuation scheme of bistable curved beam by Ampere force was proposed. Analysis showed that the actuation force distribution on the curved beam by this current-based method can improve the switching force to snap the curved beam lower than the one of the conventional actuation scheme by capacitive electrostatic force. To observe the snap action, vertical snap type SiO2 curved beams were fabricated with Cr deposited on to provide current conductivities. The Cr layer was considered to affect the original bistability characteristics of SiO2 curved beam, which in turn alter the switching force from the theoretical prediction.

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Section: Fabricationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Analysis and Fabrication of Ampere-Force Actuated Bistable Curved Beam

Pane

Asano

2009

jjap

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“…Figure 6 shows the fabrication process of the prestressed curved beam. 6) The beam is vertical snap type and created by patterning the active Si layer of silicon-on-isolator (SOI). In this study, an SOI wafer having 200 nm thick active Si layer and 400 nm thick buried oxide (BOX) was used.…”

Section: Fabricationmentioning

confidence: 99%

“…1. 6) If F is large enough in such axial compressive force P reaches a certain critical value, the beam begins to snap from initial stable bending state to the opposite one. If F vs d curve is integrated, potential energy Ep vs d curve with two valleys is obtained, which corresponds to the beam's bistability.…”

Section: Introductionmentioning

confidence: 99%

Investigation on Bistability and Fabrication of Bistable Prestressed Curved Beam

Pane

Asano

2008

jjap

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We investigated the bistability of bistable prestressed curved beam based on the theory of Euler buckling and the principle of the least energy. The bistability was found to be much affected by the ratio of the initial apex to the thickness of the curved beam. Using a standard silicon process, we fabricated curved beams made of single crystal Si. Voltage was then applied to the fabricated curved beams to generate capacitive electrostatic actuation force. The snap-through was confirmed in the range of 20 to 30 V apply voltage.

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“…Different from pre-compressed beam, a pre-stressed beam is curved by artificially creating stress during the fabrication process. In [8][9][10], Pane and Asano fabricated a bistable micro-actuator by patterning the active silicon (Si) layer of SOI (silicon-on-isolator). The pre-stress was introduced by the difference in thermal expansion between Si and SiO 2 layers during the oxidation process.…”

Section: Introductionmentioning

confidence: 99%

Multistable wireless micro-actuator based on antagonistic pre-shaped double beams

Liu

Lamarque

Dore

et al. 2015

Smart Mater. Struct.

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This paper presents a monolithic multistable micro-actuator based on antagonistic pre-shaped double beams. The designed micro-actuator is formed by two rows of bistable micro-actuators providing four stable positions. The bistable mechanism for each row is a pair of antagonistic pre-shaped beams. This bistable mechanism has an easier pre-load operation compared to the pre-compressed bistable beams method. Furthermore, it solves the asymmetrical force output problem of parallel pre-shaped bistable double beams. At the same time, the geometrical limit is lower than parallel pre-shaped bistable double beams, which ensures a smaller stroke of the micro-actuator with the same dimensions. The designed micro-actuator is fabricated using laser cutting machine on medium density fiberboard (MDF). The bistability and merits of antagonistic pre-shaped double beams are experimentally validated. Finally, a contactless actuation test is performed using 660 nm wavelength laser heating shape memory alloy (SMA) active elements.

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Fabrication of Bistable Prestressed Curved-Beam

Cited by 5 publications

References 1 publication

Analysis and Fabrication of Ampere-Force Actuated Bistable Curved Beam

Analysis and Fabrication of Ampere-Force Actuated Bistable Curved Beam

Investigation on Bistability and Fabrication of Bistable Prestressed Curved Beam

Multistable wireless micro-actuator based on antagonistic pre-shaped double beams

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