Fabrication of charged nanopore channels using pulsed plasma deposition of methacrylic acid

Abstract

Solid-state nanopore systems have emerged as novel platforms for DNA, RNA and protein analysis. In the state of the art, the nanopores are made using electron beam induced shrinking of larger pores, drilling in thin membranes or deposition of material on fabricated nanopores. These processes have slow deposition rates, provide poor control of surface composition of deposited layers and the membrane thickness defines whether a pore shrinks or expands. This paper reports a novel technique of pulsed plasma assisted polymer film deposition that offers a direct way to control shrinking of the nanopores and to impart defined surface properties to the nanopore walls.