Fabrication of coaxial plasmonic crystals by focused ion beam milling and electron-beam lithography

Jiang, Xiaoxiao; Gu, Qiang; Fengwen, Wang; Lv, Jiangtao; Ma, Zhenqiang; Si, Guangyuan

doi:10.1016/j.matlet.2013.03.040

Cited by 40 publications

(23 citation statements)

References 25 publications

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“…However, it is still hard now to produce NPC structures with narrow annular gaps though researchers are making efforts to overcome this challenge. 31,32 So far, the most widely adopted fabrication procedures to produce NPC structures all involves focused ion beam (FIB) or electron beam (EB) lithography method which is time-consuming and thus not suitable for mass manufacture. 33,34 In addition, the FIB/EB lithography method has a limitation of about 10 nm in the produced annular gap width for a thin metal film.…”

mentioning

confidence: 99%

Self-Assembled Large-Area Annular Cavity Arrays with Tunable Cylindrical Surface Plasmons for Sensing

Wang

Shen

et al. 2015

ACS Nano

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Surface plasmons that propagate along cylindrical metal/dielectric interfaces in annular apertures in metal films, called cylindrical surface plasmons (CSPs), exhibit attractive optical characteristics. However, it is challenging to fabricate these nanocoaxial structures. Here, we demonstrate a practical low-cost route to manufacture highly ordered, large-area annular cavity arrays (ACAs) that can support CSPs with great tunability. By employing a sol-gel coassembly method, reactive ion etching and metal sputtering techniques, regular, highly ordered ACAs in square-centimeter-scale with a gap width tunable in the range of several to hundreds of nanometers have been produced with good reproducibility. Ag ACAs with a gap width of 12 nm and a gap height of 635 nm are demonstrated. By finite-difference time-domain simulation, we confirm that the pronounced dips in the reflectance spectra of ACAs are attributable to CSP resonances excited in the annular gaps. By adjusting etching time and Ag film thickness, the CSP dips can be tuned to sweep the entire optical range of 360 to 1800 nm without changing sphere size, which makes them a promising candidate for forming integrated plasmonic sensing arrays. The high tunability of the CSP resonant frequencies together with strong electric field enhancement in the cavities make the ACAs promising candidates for surface plasmon sensors and SERS substrates, as, for example, they have been used in liquid refractive index (RI) sensing, demonstrating a sensitivity of 1505 nm/RIU and a figure of merit of 9. One of the CSP dips of ACAs with a certain geometry size is angle- (0-70 degrees) and polarization-independent and can be used as a narrow-band absorber. Furthermore, the nano annular cavity arrays can be used to construct solar cells, nanolasers and nanoparticle plasmonic tweezers.

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confidence: 99%

Self-Assembled Large-Area Annular Cavity Arrays with Tunable Cylindrical Surface Plasmons for Sensing

Wang

Shen

et al. 2015

ACS Nano

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“…Due to their resolution, CPL is currently the preferred technique for fabrication of plasmonic nanostructures [126][127][128][129][130]. Due to their resolution, CPL is currently the preferred technique for fabrication of plasmonic nanostructures [126][127][128][129][130].…”

Section: Metamaterials/plasmonic Metamaterialsmentioning

confidence: 99%

“…Outer radius of (a) 220 nm, (b) 260 nm, (c) 300 nm, and (d) 340 nm; with 200 nm fixed inner radius and 1200 nm period [126]. ring arrays with features below 500 nm.…”

Section: 34 Sem Images Of Coaxial Nanorings With Different Gap Widthmentioning

confidence: 99%

Two-Photon Polymerization as a Component of Desktop Integrated Manufacturing Platforms

Martínez-Chapa¹,

Salazar²,

Madou³

2016

Three-Dimensional Microfabrication Using Two-Photon Polymerization

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“…The rapid development of plasmonics [1][2][3] and plasmonrelated devices [4][5][6][7][8][9][10][11][12] paves the way for controlling electromagnetic waves at the nanoscale. The coherent free electron excitations (i.e., surface plasmon resonances, SPRs) which exist at the metal/dielectric interfaces are normally generated by illuminating light to metallic or metallic-dielectric hybrid structures.…”

Section: Introductionmentioning

confidence: 99%

Plasmon‐Enhanced Sensing: Current Status and Prospects

Leong

Jiang

et al. 2015

Journal of Nanomaterials

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By combining different plasmonic nanostructures with conventional sensing configurations, chemical/biosensors with significantly enhanced device performance can be achieved. The fast development of plasmon-assisted devices benefits from the advance of nanofabrication technology. In this review, we first briefly show the experimental configurations for testing plasmon enhanced sensing signals and then summarize the classic nanogeometries which are extensively used in sensing applications. By design, dramatic increment of optical signals can be obtained and further applied to gas, refractive index and liquid sensing.

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Fabrication of coaxial plasmonic crystals by focused ion beam milling and electron-beam lithography

Cited by 40 publications

References 25 publications

Self-Assembled Large-Area Annular Cavity Arrays with Tunable Cylindrical Surface Plasmons for Sensing

Self-Assembled Large-Area Annular Cavity Arrays with Tunable Cylindrical Surface Plasmons for Sensing

Two-Photon Polymerization as a Component of Desktop Integrated Manufacturing Platforms

Plasmon‐Enhanced Sensing: Current Status and Prospects

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