Transducers ’01 Eurosensors XV 2001
DOI: 10.1007/978-3-642-59497-7_377
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Fabrication of Complex Micro Channel Systems Inside Optically-Transparent 3D Substrates by Laser Processing

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Cited by 5 publications
(2 citation statements)
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“…2 shows that the channel width ranges from 35 m to 350 nm. Qin and Li [33] have shown a novel technique in creating microchannels/nanochannels using a Nd:YAG laser in a dry process.…”
Section: Case Studies and Discussionmentioning
confidence: 99%
“…2 shows that the channel width ranges from 35 m to 350 nm. Qin and Li [33] have shown a novel technique in creating microchannels/nanochannels using a Nd:YAG laser in a dry process.…”
Section: Case Studies and Discussionmentioning
confidence: 99%
“…2 shows that the channel width ranges from 35 µm to 350 nm. Qin and Li [34] have shown a novel technique in creating micro/nano-channels using a Nd:YAG laser in a dry process.…”
Section: Case Studies and Discussionmentioning
confidence: 99%