Fabrication of Complex Micro/Nanopatterns on Semiconductors by the Multi-beam Interference of Femtosecond Laser

Abstract

Short periodic nanostructures with periods much smaller than the laser wavelength (1/10-1/2 ) are fabricated on semiconductors after femtosecond laser irradiation. Laser polarization is an important factor to influence the formation of laser-induced nanostructures. Combining the fabrication of short periodic nanostructures induced by femtosecond laser with multi-beam interference, different types of complex micro/nanopatterns have been induced by the two-, three-and four-beam interferences of femtosecond laser with the modification of laser polarization combinations. The micro/nanopatterns are composed of two parts: two-dimensional long periodic micro-patterns and short periodic nano-patterns. Theoretical calculations of interferential polarization and intensity patterns for different polarization combinations explain well the experimental results. These researches have potential applications in the nanopatterning of semiconductors.

In situ thermal characterisation and filamentary modification in Polymethylpentene

“…The laser writing devices at sub-nanosecond scale need high NA objectives, being the problem of the low production efficiency. This problem can be well solved using two-beam interference [19] or holographic beam splitting method [20].Using ultrafast pulses with a designated characteristic wavelength can generate functional structures in solid materials, including dielectrics [21], polymers [22] and even semiconductors [23]. This inscription opens up a method to construct 2D or 3D structures in transparent materials.…”

Study on Femtosecond Laser Processing Characteristics of Nano-Crystalline CVD Diamond Coating

“…The mentioned problems can be effectively solved by adopting femtosecond (fs) laser processing technology in the machining of diamond tools. At present, fs laser processing technology has been successfully applied across various industries for its material versatility [4][5][6][7][8] and found its place in ultra-precision machining owing to its ultra-short pulse width and high spatial resolution. In addition, the excellent geometric flexibility of laser machining makes it possible to fabricate complex micro or nano three-dimensional structures by fs laser processing.…”

Surface Morphology Evolution Induced by Multiple Femtosecond Laser Ablation on 4H-SiC Substrate and Its Application to CMP

“…Low spatial frequency laser-induced ripples (LSFL) with a periodicity of 350 ∼ 600 nm and high spatial frequency periodic ripples (HSFL) with a periodicity of 50 ∼ 200 nm were induced on different metallic film surfaces in different ambient environment. 1 Formation of nano/micro patterns induced by fs laser on semiconductors (ZnO, 2,3 AlGaInP, 4 Si, [5][6][7][8] InP, etc.) have also been formed in several processing conditions.…”