2011
DOI: 10.5194/ms-2-129-2011
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Fabrication of compliant mechanisms on the mesoscale

Abstract: Abstract. The fabrication of compliant mechanisms on the mesoscale requires collaboration of mechanical engineering design, with materials science and engineering fabrication approaches. In this paper, a review of current fabrication approaches to produce mesoscale devices is given, highlighting the benefits and limitations of each technique. Additionally, a hierarchy is provided, eliminating fabrication techniques that do not completely satisfy the mechanical design requirements of the compliant mechanisms. F… Show more

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Cited by 13 publications
(8 citation statements)
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“…The lost mold-rapid infiltration forming (LM-RIF) process, developed at Penn State, can be used to fabricate C 3 M devices of both metallic (316L stainless steel) and ceramic (3 mol% yttria-stabilized zirconia) materials. The LM-RIF process is described in Aguirre et al (2011), Antolino et al (2009a, 2009b, and Hayes et al (2011) and is summarized briefly here. The process is used to directly fabricate several C 3 M designs in multiple array sizes and involves the following steps: mold fabrication, colloidal suspension formulation, casting, and sintering.…”
Section: Fabrication Of Mesoscale C 3 Mmentioning
confidence: 99%
See 1 more Smart Citation
“…The lost mold-rapid infiltration forming (LM-RIF) process, developed at Penn State, can be used to fabricate C 3 M devices of both metallic (316L stainless steel) and ceramic (3 mol% yttria-stabilized zirconia) materials. The LM-RIF process is described in Aguirre et al (2011), Antolino et al (2009a, 2009b, and Hayes et al (2011) and is summarized briefly here. The process is used to directly fabricate several C 3 M designs in multiple array sizes and involves the following steps: mold fabrication, colloidal suspension formulation, casting, and sintering.…”
Section: Fabrication Of Mesoscale C 3 Mmentioning
confidence: 99%
“…Microfabrication has been used to develop a variety of ceramic and stainless steel components for mesoscale systems, including components for microelectromechanical systems (MEMS) (Christian and Kenis, 2007;Garino et al, 2002;Heule and Gauckler, 2001;Maeda et al, 2004) and microcomponents, such as microgears and micropistons (Imbaby and Jiang, 2009;Zhu et al, 2010). Microfabrication has also been used to fabricate other devices from both ceramics and stainless steel, including cellular structures (Mehta, 2010) and mesoscale surgical tools for endoscopic surgery (Aguirre et al, 2011;Hayes et al, 2011).…”
Section: Introductionmentioning
confidence: 99%
“…They have been used as a solution for systems that require simplicity in form while retaining complex motion, but such mechanisms are challenging to form and assemble on small scales [3]. Many such mechanisms require feature precision on the mesoscale (0.1-5 mm) and low macroscale (5-100 mm), which can be difficult to create [4]. Metals are used in compliant mechanisms for their various desirable properties (e.g., electrical/thermal conductivity, durability, recyclability, and cleanability).…”
Section: Introductionmentioning
confidence: 99%
“…However, it has limited miniaturization and a high manufacturing cost, the latter due to elaborate fabrication processes such as wire electric discharge machining (WEDM) and precision cutting. On the other hand, MEMS fabrication, using metal and silicon materials, need a complex process to produce three-dimensional structures [14,15].…”
Section: Introductionmentioning
confidence: 99%